Semiconductor device
View Patent ↗A problem of an increased manufacturing cost is caused in conventional semiconductor devices. A semiconductor device 1 includes: a lower electrode 102 provided on a semiconductor substrate 101 ; an insulating film 105 , provided on the lower electrode 102 so as to be in contact with the lower electrode 102 ; an upper electrode 103 , provided on the insulating film 105 so as to be in contact with the insulating film 105 ; an opening portion 121 , provided in the lower electrode 102 and extending through the lower electrode 102 ; and an opening portion 122 , provided in the upper electrode 103 and extending through the upper electrode 103 . The insulating film 123 is embedded in the opening portion 121 that is provided in the lower electrode 102 . Similarly, the insulating film 124 is embedded in the opening portion 122 that is provided in the upper electrode 103.
1. A semiconductor device, comprising:
a first electrode provided on a semiconductor substrate;
a capacitive film, provided on said first electrode so as to be in contact with the first electrode;
a second electrode, provided on said capacitive film so as to be in contact with the capacitive film, said second electrode, said first electrode and said capacitive film constituting a capacitor element;
a first opening portion, provided in said first electrode and extending through the first electrode; and
a second opening portion, provided in said second electrode and extending through the second electrode,
wherein insulating films are embedded within said first opening portion and said second opening portion,
wherein a width of said first opening portion is equal to or shorter than a thickness of said first electrode and a width of said second opening portion is equal to or shorter than a thickness of said second electrode, and
wherein an orthogonal projection of said first opening portion to a plane that is parallel to a substrate surface of said semiconductor substrate is identical with an orthogonal projection of said second opening portion to said plane.
2. The semiconductor device according to claim 1 , wherein said first opening portion and said second opening portion are slit-shaped in plan view.
3. The semiconductor device according to claim 1 , wherein a plurality of said first opening portions and a plurality of said second opening portions are provided, and are arranged to form a lattice pattern in plan view.