Apparatus and method for reducing removal forces for CMP pads
View Patent ↗An improvement in a polishing apparatus for planarizing substrates comprises a tenacious coating of a low-adhesion material to a platen surface. An expendable polishing pad is adhesively attached to the low-adhesion material, and may be removed for periodic replacement at much reduced expenditure of force. Polishing pads joined to low-adhesion materials such as polytetrafluoroethylene (PTFE) by conventional adhesives resist distortion during polishing but are readily removed for replacement.
1. A method for attaching a polishing pad to a platen, wherein the platen comprises an upper surface, at least a portion of the upper surface being coated with a coating of a fluoropolymer material, the method comprising:
adhesively attaching the polishing pad to the coating of the upper surface of the platen using an adhesive material.
2. The method of claim 1 , wherein the upper surface has an aperture therein, wherein at least a portion of the aperture is free of attachment to the polishing pad.
3. The method of claim 1 , wherein the coating of the fluoropolymer material is selected from the group consisting of polytetrafluoroethylene (PTFE), polymonochlorotrifluoroethylene (CTFE) and polyvinylidene fluoride (PVF 2 ).
4. The method of claim 1 , wherein the upper surface includes a network of channels for slurry flow formed therein.
5. A method of attaching a polishing pad to a platen for polishing wafers, wherein the platen comprises an upper surface, at least a portion of the upper surface being coated with a coating of a fluoropolymer material, the method comprising:
attaching the polishing pad directly to the coating using an adhesive material.
6. The method of claim 5 , wherein the platen is configured to rotate about an axis normal to a first surface of a rigid member.
7. The method of claim 5 , wherein the adhesive material is a pressure-sensitive adhesive material.
8. The method of claim 5 , wherein the upper surface is configured for use in a chemical-mechanical polishing process using the polishing pad.
9. A method of attaching a polishing pad to a platen for polishing wafers, the method comprising:
coating a fluoropolymer material on at least a portion of a first surface of the platen; and
adhesively attaching a polishing pad to the coating of fluoropolymer material, the coating of fluoropolymer material comprising a roughened fluoropolymer coating enhancing adhesion between the coating of fluoropolymer material and a pressure-sensitive adhesive material by directly attaching the polishing pad to the coating of fluoropolymer material on the at least a portion of the first surface of the platen.
10. A wafer polishing method, comprising:
adhesively attaching a polishing pad directly to a platen, the platen including a coating of a fluoropolymer material on at least a portion of a first surface thereof, by adhesively attaching the polishing pad directly to the coating of the fluoropolymer material on the at least a portion of the first surface of the platen; and
contacting a surface of the wafer with a portion of the polishing pad.
11. The method of claim 10 , further comprising:
contacting an attachment surface of the polishing pad and the coating of the fluoropolymer material on the at least a portion of the first surface of the platen with a pressure-sensitive adhesive material for adhesively attaching the polishing pad directly to the coating of the fluoropolymer material on the at least a portion of the first surface of the platen.
12. A platen for a polishing apparatus for polishing wafers, comprising:
a platen including a coating of a fluoropolymer material directly coated on at least a portion of a first surface of the platen for directly adhesively attaching a polishing pad to at least a portion of the coating of the fluoropolymer material on the at least a portion of the first surface of the platen for a polishing process for the wafers.
13. The platen of claim 12 , wherein the platen has a substantially planar first surface thereof configured for use in a chemical-mechanical polishing process using the polishing pad directly adhesively attached to at least a portion of the coating of the fluoropolymer material.
14. The platen of claim 12 , wherein a substantially planar first surface of the platen includes a network of channels therein for passage of a slurry therethrough, and wherein the coating of fluoropolymer material on the substantially planar first surface of the platen being configured for direct adhesive attachment of the polishing pad having through-apertures for discharge of the slurry onto a polishing surface.
15. A polishing apparatus for planarizing a substrate, the polishing apparatus comprising:
a polishing pad including a polishing surface;
a platen having a first surface including a coating of low-adhesion material thereon for adhesive attachment of at least a portion of the polishing pad directly thereto;
a substrate carrier for holding a substrate against the polishing surface of the polishing pad; and
moving apparatus for moving the platen and substrate carrier relative to each other for polishing a portion of the substrate.
16. The polishing apparatus of claim 15 , wherein the coating of low-adhesion material is selected from the group consisting of polytetrafluoro-ethylene (TFE), polymonochlorotrifluoroethylene (CTFE) and polyvinylidene fluoride (PVF 2 ).
17. The polishing apparatus of claim 15 , further comprising:
a pressure sensitive adhesive material joining the polishing pad to the coating of low-adhesion material on the platen.