Substrate processing apparatus
A substrate processing apparatus includes a reaction tube, the reaction tub including an inner tube made of quartz and an outer tube made of quartz; a manifold made of quartz disposed under the outer tube, a top surface of the manifold being in air-tight contact with a bottom surface of the outer tube via a sealing member; a seal cap cover made of quartz disposed under the manifold, a top surface of the seal cap cover being in air-tight contact with a bottom surface of the manifold via a sealing member; a seal cap covered by the seal cap cover, a top surface of the seal cap being in air-tight contact with a bottom surface of the seal cap cover via a sealing member; and at least one protrusion disposed at the bottom surface of one of the outer tube, the manifold, the seal cap cover, and combinations thereof.
1. A substrate processing apparatus comprising:
a reaction tube comprising an inner tube and an outer tube;
a manifold disposed under the outer tube, a top surface of the manifold being in air-tight contact with a bottom surface of the outer tube via a sealing member;
a seal cap cover disposed under the manifold, a top surface of the seal cap cover being in air-tight contact with a bottom surface of the manifold via a sealing member;
a seal cap covered by the seal cap cover, a top surface of the seal cap being in air-tight contact with a bottom surface of the seal cap cover via a sealing member; and
at least one protrusion disposed at one of the bottom surface of the outer tube, the bottom surface of the manifold, the bottom surface of the seal cap cover and combinations thereof, wherein the protrusion at the bottom surface of the outer tube is disposed outside the sealing member between the top surface of the manifold and the bottom surface of the outer tube, the protrusion at the bottom surface of the manifold is disposed outside the sealing member between the top surface of the seal cap cover and the bottom surface of the manifold, and the protrusion at the bottom surface of seal cap cover is disposed outside the sealing member between the top surface of the seal cap and the bottom surface of the seal cap cover.
2. The substrate processing apparatus of claim 1 , wherein the outer tube comprises an exhaust pipe having a flange, and a bottom surface of the protrusion at the bottom surface of the outer tube is lower than a lowermost part of the flange.
3. The substrate processing apparatus of claim 1 , wherein the at least one protrusion disposed at the bottom surface of the outer tube has a ring shape.
4. A substrate processing apparatus comprising:
a reaction tube comprising an inner tube and an outer tube;
a manifold disposed under the outer tube, a top surface of the manifold being in air-tight contact with a bottom surface of the outer tube via a sealing member; and
a protrusion disposed at a bottom surface of a flange part of the outer tube, the protrusion being disposed outside the sealing member between the top surface of the manifold and the bottom surface of the outer tube and protruding downward from the bottom surface of the flange part.
5. A reaction tube comprising:
an inner tube and an outer tube;
a manifold disposed under the outer tube, a top surface of the manifold being in air-tight contact with a bottom surface of the outer tube via a sealing member; and
a protrusion disposed at a bottom surface of a flange part of the outer tube, the protrusion being disposed outside the sealing member between the top surface of the manifold and the bottom surface of the outer tube and protruding downward from the bottom surface of the flange part.
6. The substrate processing apparatus of claim 4 ,
wherein the outer tube comprises an exhaust pipe having a flange, and
wherein a bottom surface of the protrusion at the bottom surface of the outer tube is lower than a lowermost part of the flange.
7. The reaction tube of claim 5 ,
wherein the outer tube comprises an exhaust pipe having a flange, and
wherein a bottom surface of the protrusion at the bottom surface of the outer tube is lower than a lowermost part of the flange.
8. The reaction tube of claim 5 , wherein the protrusion has a ring shape.