Compositions for Preparing Low Dielectric Materials Containing Solvents
Silica-based materials and films having a dielectric constant of 3.7 or below and compositions and methods for making and using same are disclosed herein. In one aspect, there is provided a composition for preparing a silica-based material comprising an at least one silica source, a solvent, an at least one porogen, optionally a catalyst, and optionally a flow additive wherein the solvent boils at a temperature ranging from 90° C. to 170° C. and is selected from the group of compounds represented by the following formulas: HO—CHR 8 —CHR 9 —CH 2 —CHR 10 R 11 where R 8 , R 9 , R 10 and R 11 can independently be an alkyl group ranging from 1 to 4 carbon atoms or a hydrogen atom; and R 12 —CO—R 13 where R 12 is a hydrocarbon group having from 3 to 6 carbon atoms; R 13 is a hydrocarbon group having from 1 to 3 carbon atoms; and mixtures thereof.
1 - 20 . (canceled)
21 . A composition for forming a silica-based film having a dielectric constant of about 3.7 or less comprising: an at least one silica source, a solvent wherein the solvent boils at a temperature ranging from 90° C. to 170° C. and is at least one selected from an alcohol solvent, a ketone solvent, an amide solvent, an ester solvent, and combinations thereof, optionally at least one porogen, optionally a catalyst, optionally water, and a flow additive.
22 - 25 . (canceled)
26 . A process for forming a silica-based film with a dielectric constant of 3.7 or less, the process comprising:
providing a composition comprising: an at least one silica source, a solvent, optionally an at least one porogen, optionally an at least one catalyst, and optionally a flow additive wherein the solvent wherein the solvent boils at a temperature ranging from 90° C. to 170° C.;
depositing the composition onto a substrate using a bowl configuration selected from an open spinning bowl configuration and a semi-closed spinning bowl configuration to form a coated substrate; and
curing the coated substrate to form the silica-based film.
27 - 28 . (canceled)
29 . The process of claim 26 wherein the solvent comprises one or more functionalities selected from hydroxyl, carbonyl, ester, and combinations thereof.
30 . (canceled)
31 . The process of claim 26 wherein the solvent has a total solubility parameter ranging from 15 and 25 (J/m 3 ) 1/2 , a surface tension ranging from 20 to 50 dyne/cm, a viscosity ranging from 0.5 to 7 centipoise as measured by parallel plate methodology, or combinations thereof.
32 - 35 . (canceled)
36 . The process of claim 26 wherein the solvent is selected from 1-pentanol, 2-pentanol, 2-methyl-1-butanol, 2-methyl-1-pentanol, 2-ethoxyethanol, 2-propoxyethanol, 1-propoxy-2-propanol, 2-heptanone, 4-heptanone, 1-tert-butoxy-2-ethoxyethane, 2-methoxyethylacetate, propylene glycol methyl ether acetate, pentyl acetate, 1-tert-butoxy-2-propanol, 2,3-dimethyl-3-pentanol, 1-methoxy-2-butanol, 4-methyl-2-pentanol, 1-tert-butoxy-2-methoxyethane, 3-methyl-1-butanol, 2-methyl-1-butanol, 2-methoxyethanol, 3-methyl-2-pentanol, 1,2-diethoxyethane, 1-methoxy-2 propanol, 1-butanol, 3-methyl-2-butanol, 5-methyl-2-hexanol, and mixtures thereof.
37 . The process of claim 26 wherein the solvent is selected from ethylene glycol ethers, propylene glycol ethers, ethylene glycol ether acetates, propylene glycol ether acetates, and mixtures thereof.
38 . The process of claim 26 wherein the at least one silica source hydrolyzes and condenses and the product of hydrolysis and condensation has a radius of gyration of 5 nanometers or less.
39 . A silica-based film formed by the process of claim 26 .
40 - 42 . (canceled)
43 . The silica-based film of claim 39 wherein the film exhibits a film uniformity of 5% or less.
44 . A process for forming a silica-based film having a dielectric constant of 3.7 or less, the process comprising:
providing a composition comprising: an at least one silica source wherein the at least one silica source partially hydrolyzes to provide a low boiling solvent, an at least one solvent, water, optionally an ionic additive, optionally at least one porogen, and a catalyst wherein the solvent boils at a temperature ranging from 90° C. to 170° C. and is selected from the group of compounds represented by the following formulas:
a. HO—CHR 8 —CHR 9 —CH 2 —CHR 10 R 11 where R 8 , R 9 , R 10 and R 11 can independently be an alkyl group ranging from 1 to 4 carbon atoms or a hydrogen atom; and
b. R 12 —CO—R 13 where R 12 is a hydrocarbon group having from 3 to 6 carbon atoms; R 13 is a hydrocarbon group having from 1 to 3 carbon atoms; and mixtures thereof.
removing from the composition from about 20 to about 75% of the total number of moles of low boiling solvents and from 20 to 80% of the total number of moles of water to provide a reduced composition;
depositing the reduced composition onto a substrate using a bowl configuration selected from an open spinning bowl configuration and a semi-closed spinning bowl configuration to form a coated substrate; and
curing the coated substrate to form the silica-based film.
45 . The process of claim 44 further comprising adding to the reduced composition solvent prior to depositing.
46 - 52 . (canceled)
53 . The process of claim 44 wherein the reduced composition has an ambient temperature storage stability of 10 days or greater.
54 - 59 . (canceled)
60 . The silica-based film of claim 39 wherein the film comprises pores.