Semiconductor device and method for manufacturing the same
View Patent ↗Disclosed are a semiconductor device and a method for manufacturing the same. The semiconductor device includes an isolation area formed on a semiconductor substrate to define NMOS and PMOS areas, a gate insulating layer and a gate formed on each of the NMOS and PMOS areas, a primary gate spacer formed at sides of the gate, LDD areas formed in the semiconductor substrate at sides of the gate, a secondary gate spacer formed at sides of the primary gate spacer, source and drain areas formed in the semiconductor substrate at sides of the gate of the PMOS area; and source and drain areas formed in the semiconductor substrate at sides of the gate of the NMOS area, wherein the source and drain areas of the NMOS area are deeper than the source and drain areas of the PMOS area.
1. A method for manufacturing a semiconductor device, the method comprising:
forming an isolation area, defining an NMOS area and a PMOS area, on a semiconductor substrate, and forming a gate insulating layer and a gate on each of the NMOS and PMOS areas;
forming a primary gate spacer layer on the semiconductor substrate including the gates, and forming LDD areas at sides of the gates;
forming a primary gate spacer at both sides of the gate by etching the primary gate spacer layer after forming the LDD areas;
forming a secondary gate spacer layer on the semiconductor substrate including on the gates and the primary gate spacer, and forming source and drain areas at sides of the gate in the PMOS area;
forming a second gate spacer at sides of the gates by etching the secondary gate spacer layer after forming the source and drain areas in the PMOS area; and
forming source and drain areas at sides of the gate in the NMOS area using the second gate spacer as a mask.
2. The method of claim 1 , wherein one of the primary and secondary gate spacers comprises SiN.
3. The method of claim 1 , wherein the forming of the LDD area includes forming a pocket area.
4. The method of claim 3 , wherein the pocket area of the NMOS area is formed by implanting at least one of BF 2 and In, and the pocket area of the PMOS area is formed by implanting at least one of As and Sb.
5. The method of claim 3 , wherein the LDD area and the pocket area are simultaneously formed through one ion implantation process.
6. The method of claim 1 , wherein the LDD area of the NMOS area is formed by implanting ions including at least one of As and Sb, and the LDD area of the PMOS area is formed by implanting ions including at least one of B and In.
7. The method of claim 1 , wherein at least one of the primary and secondary gate spacers is self-aligned through a blanket etching process.
8. The method of claim 1 , wherein the secondary gate spacer layer has a thickness of two to four times a thickness of the primary gate spacer.
9. The method of claim 1 , wherein the forming of the source and drain areas in the PMOS area comprises:
forming the secondary gate spacer layer on the semiconductor substrate;
forming a photoresist pattern on the semiconductor device such that the NMOS area is covered;
forming the source and drain areas in the PMOS area by performing an ion implantation process through the secondary gate spacer layer using the photoresist pattern as a mask; and
removing the photoresist pattern.
10. The method of claim 1 , wherein the source and drain areas of the PMOS area are formed by implanting ions including at least one of B and In.
11. The method of claim 1 , wherein the forming of the source and drain areas in the NMOS area includes:
forming the secondary gate spacer at the sides of the gates;
forming a photoresist pattern on the semiconductor device such that the PMOS area is covered;
forming the source and drain areas in the NMOS area by performing an ion implantation process using the secondary gate spacer and the photoresist pattern as a mask; and
removing the photoresist pattern.
12. The method of claim 1 , wherein the source and drain areas of the NMOS area is formed by implanting ions including at least one of As and Sb.
13. The method of claim 1 , wherein the source and drain areas of the NMOS area are formed more deeply than the source and drain areas of the PMOS area.
14. The method of claim 1 , further comprising activating an active junction area through a spike anneal process, after forming the source and drain areas in the NMOS area.
15. A semiconductor device comprising:
an isolation area on a semiconductor substrate, defining NMOS and PMOS areas;
a gate insulating layer and a gate on each of the NMOS and PMOS areas;
a primary gate spacer at sides of the gates;
LDD areas at sides of the gates, including under the primary gate spacer;
a secondary gate spacer at sides of the primary gate spacer, wherein the secondary gate spacer is disposed on a sidewall of the primary gate spacer and the semiconductor substrate adjacent the primary gate spacer;
source and drain areas at sides of the gate of the PMOS area, including under the secondary gate spacer; and
source and drain areas at sides of the gate of the NMOS area, including under the secondary gate spacer,
wherein the source and drain areas of the NMOS area are deeper than the source and drain areas of the PMOS area.
16. The semiconductor device of claim 15 , wherein at least one of the primary and second gate spacer layers comprises SiN.
17. The semiconductor device of claim 15 , further comprising a pocket area including at least a portion of the LDD area.
18. The semiconductor device of claim 15 , wherein the secondary gate spacer has a thickness of two to four times a thickness of the primary gate spacer.