Devices containing permanent charge

1. A high-voltage solid-state device, comprising:

an array of active device portions, containing at least some trenches which have added permanent charge therein, and

are laterally surrounded, for the majority of their vertical extent, by semiconductor material which is doped with a first conductivity type; and

a termination structure which surrounds said array, and which includes a final dielectric trench containing permanent charge:

wherein said final dielectric trench is surrounded by said material of said first conductivity type, and wherein doping of said material tapers off laterally to a junction, and said material outside of said junction is predominantly of a second conductivity type.

2. The device of claim 1 , wherein said permanent charge is provided by immobile cesium ions.

3. The device of claim 1 , wherein said termination structure further comprises a field plate.

4. The device of claim 1 , wherein said termination structure extends out toward the edge of the semiconductor material in which said device is built.

5. The device of claim 1 , wherein said termination structure includes at least one diffused guard ring.

6. The device of claim 1 , wherein said first conductivity type is p-type, and said termination structure includes at least one p-type ring diffusion.

7. The device of claim 1 , wherein said junction is predominantly vertical.

8. The device of claim 1 , wherein said first conductivity type is p-type.

9. The device of claim 1 , wherein said trenches within said array include conductive gate electrodes.

10. The device of claim 1 , wherein some of said trenches within said array include conductive gate electrodes, and others of said trenches within said array do not.

11. A high-voltage solid-state device, comprising:

an array of active device portions, containing at least some trenches which include gate electrodes, and

have added permanent charge therein, and

are laterally surrounded, for the majority of their vertical extent, by semiconductor material which is doped with a first conductivity type and is capacitively coupled, at least in part, to ones of said gate electrodes; and

a termination structure which surrounds said array, and which includes a final dielectric trench which contains permanent charge and which has approximately the same depth as said trenches in said array:

wherein said final dielectric trench is surrounded by said material of said first conductivity type, and wherein doping of said material tapers off laterally to a predominantly vertical junction, and said material outside of said junction is predominantly of a second conductivity type.

12. The device of claim 11 , wherein said first conductivity type is p-type, and said termination structure includes at least one p-type ring diffusion.

13. The device of claim 11 , wherein some of said trenches within said array include conductive gate electrodes, and others of said trenches within said array do not.

14. A high-voltage solid-state device, comprising:

an array of active device portions, containing

first trenches which have added permanent charge, and contain conductive gate electrodes, and are laterally surrounded, for at least some of their vertical extent, by semiconductor material which is doped with a first conductivity type; and also

source diffusions of a second conductivity type, at least partly overlying said semiconductor material which laterally surrounds ones of said first trenches; and

second trenches which are different from said first trenches; and

a termination structure which laterally surrounds said array, and which includes a final dielectric trench which is also surrounded by said material of said first conductivity type, and wherein doping of said material tapers off laterally to a substantially vertical junction, and wherein said termination structure also contains peak-field-reducing structures outside said junction.

15. The device of claim 14 , wherein said final trench is structurally similar to said first trenches, but not said second trenches.

16. The device of claim 14 , wherein said final trench is structurally similar to said second trenches, but not to said first trenches.

17. The device of claim 14 , wherein said termination structure includes at least one diffused guard ring.

18. The device of claim 14 , wherein said first conductivity type is p-type, and said termination structure includes at least one p-type ring diffusion.

19. The device of claim 14 , wherein said junction is vertical for the depth of said first trenches.