Method for producing a semiconductor wafer
View Patent ↗A method for producing a semiconductor wafer. The method includes placing the semiconductor wafer in a cutout in a carrier. Both sides of the semiconductor wafer are polished between an upper and a lower polishing plate with a polishing agent until the thickness of the center of the semiconductor wafer is less than the thickness of the carrier and from 10 μm to 30 μm of semiconductor wafer material is removed. The polishing agent contains 0.1 to 0.4% by weight of SiO 2 and 0.1 to 0.9% by weight of an alkaline component.
1. A method for producing a semiconductor wafer, the method comprising:
disposing the semiconductor wafer in a cutout in a carrier; and
polishing both sides of the semiconductor wafer between an upper and a lower polishing plate with a polishing agent until the difference between the thickness of the center of the semiconductor wafer and the thickness of the carrier is −2.5 μm to −5 μm and until from 10 μm to 30 μm of semiconductor wafer material is removed,
wherein the polishing agent contains 0.1 to 0.4% by weight of SiO 2 and 0.1 to 0.9% by weight of an alkaline component, and
wherein no further double side polishing (DSP) is carried out.
2. The method as recited in claim 1 , wherein the polishing agent contains 0.2 to 0.3% by weight SiO 2 and 0.5 to 0.7% by weight of an alkaline component.
3. The method as recited in claim 1 , wherein the difference between the thickness of the center of the semiconductor wafer and the thickness of the carrier is −2.5 μm to −3.5 μm.
4. The method as recited in claim 1 , wherein the alkaline component contains at least one of potassium carbonate, sodium hydroxide, potassium hydroxide, tetramethylammonium hydroxide or other quaternary ammonium compounds.
5. The method as recited in claim 1 , wherein the alkaline component contains at least one of potassium carbonate or tetramethylammonium hydroxide.
6. The method as recited in claim 1 , wherein SiO 2 and the alkaline component are not mixed together until directly before the polishing agent is used.
7. The method as recited in claim 6 , wherein the SiO 2 and the alkaline component are mixed together from 1 sec to 60 sec before the polishing agent is used.