Manufacturing method of semiconductor device
View Patent ↗Size of a chipping is made small, suppressing blinding of a blade, when performing dicing of a wafer. When cutting a wafer, cutting is performed so that the portion of a V character-shaped shoulder may enter below the front surface of a wafer (depth Z 2 from a substrate front surface) using the metal-bond blade which includes the abrasive particle whose fineness number is more than #3000, and whose point is V character form. By processing it in this way, cutting resistance goes up and blinding of a blade can be prevented. Hereby, the size of a chipping can be suppressed small, preventing blinding of a blade.
1. A method of manufacturing a semiconductor device, said method comprising the steps of:
a) preparing a wiring board having a top surface and a bottom surface opposite to said top surface, said wiring board having a plurality of mounting areas on said top surface for boarding a plurality of semiconductor chips;
b) mounting a plurality of semiconductor chips on said plurality of mounting areas on said top surface of said wiring board;
c) connecting said plurality of semiconductor chips and said wiring board by a plurality of connecting wires;
d) sealing said plurality of semiconductor chips and said plurality of wires in block by resin;
e) forming a plurality of soldering balls on said bottom surface of said wiring board;
f) forming a plurality of semiconductor packages by individually separating said wiring board with said resin;
wherein, each of said plurality of semiconductor chips having:
a silicon substrate;
a plurality of transistors formed on the surface of said silicon substrate;
a first insulating film of silicone oxide formed on said plurality of transistors;
a multi layer wiring structure formed on said first insulating film;
a second insulating film formed between wiring layers of said multi layer wiring structure, said second insulating film having a lower dielectric constant than said silicon oxide;
and wherein, each of said semiconductor chips having an inclined surface on each of side surfaces thereof, said inclined surface being formed by cutting an upper surface of a semiconductor wafer by a blade having a processed V-shape at the tip thereof.
2. The method of manufacturing a semiconductor device according to claim 1 , wherein said second insulating film is a SiOC film.
3. The method of manufacturing a semiconductor device according to claim 1 , wherein said second insulating film is comprised of a material selected from a group of SiOF film, SiLK film, SiCN film, SiO 2 film containing a methyl group and Methyl Silses Quioxane film.