Image sensor and method for manufacturing the same
View Patent ↗Embodiments provide an image sensor. The image sensor includes readout circuitry, an interlayer dielectric, an interconnection, and an image sensing device. The interconnection includes a lower barrier metal and a nitride barrier formed under the lower barrier metal. A contact plug electrically connecting the lower barrier metal to a lower interconnect is formed passing through the nitride barrier.
1. An image sensor comprising:
a readout circuitry on a first substrate;
an interlayer dielectric over the first substrate;
an interconnection in the interlayer dielectric and electrically connected to the readout circuitry; and
an image sensing device over the interconnection and electrically connected to the readout circuitry through the interconnection,
wherein the interconnection comprises:
a nitride barrier;
a lower barrier metal on the barrier;
an upper barrier metal on the metal layer; and
a contact plug through the nitride barrier,
wherein the lower barrier metal is formed on and contacts the contact plug and the nitride barrier,
wherein a lateral width of the nitride barrier is substantially the same as a lateral width of the lower barrier metal.
2. The image sensor according to claim 1 , further comprising an electrical junction region in the first substrate and electrically connecting the interconnection to the readout circuitry.
3. The image sensor according to claim 2 , wherein the electrical junction region comprises:
a first conductive type ion implantation region in the first substrate; and
a second conductive type ion implantation region over the first conductive type ion implantation region.
4. The image sensor according to claim 2 , wherein the readout circuitry has a potential difference between a source and a drain of a transistor, the electrical junction region being at the source of the transistor.
5. The image sensor according to claim 2 , wherein the electrical junction region is a PN junction.
6. The image sensor according to claim 2 , further comprising a first conductive type connection between the electrical junction region and the interconnection.
7. The image sensor according to claim 6 , wherein the first conductive type connection is electrically connected to the interconnection at an upper part of the electrical junction region.
8. The image sensor according to claim 6 , wherein the first conductive type connection is at one side of the electrical junction region and electrically connects the interconnection to the electrical junction region.
9. A method for manufacturing an image sensor comprising:
forming a readout circuitry on a first substrate;
forming an interlayer dielectric over the first substrate;
forming an interconnection in the interlayer dielectric and electrically connected to the readout circuitry; and
forming an image sensing device over the interconnection and electrically connected to the readout circuitry through the interconnection,
wherein forming the interconnection comprises:
forming a nitride barrier;
forming a contact plug through the nitride barrier;
forming a lower barrier metal on the contact plug and the nitride barrier;
forming a metal layer on the lower barrier metal; and
forming an upper barrier metal on the metal layer,
wherein the lower barrier metal is formed on and contacts the contact plug and the nitride barrier,
wherein a lateral width of the nitride barrier is substantially the same as a lateral width of the lower barrier metal.
10. The method according to claim 9 , further comprising forming an electrical junction region in the first substrate, wherein the electrical junction region electrically connects the interconnection to the readout circuitry.
11. The method according to claim 10 , wherein the forming of the electrical junction region comprises:
forming a first conductive type ion implantation region in the first substrate; and
forming a second conductive type ion implantation region on the first conductive type ion implantation region.
12. The method according to claim 10 , wherein the electrical junction region is a PN junction.
13. The method according to claim 10 , further comprising forming a first conductive type connection between the electrical junction region and the interconnection.
14. The method according to claim 13 , wherein the first conductive type connection is electrically connected to the interconnection at an upper part of the electrical junction region.
15. The method according to claim 13 , wherein the first conductive type connection is formed at one side of the electrical junction region and electrically connects the interconnection to the electrical junction region.