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App. No. 12/552,483 · Confirmation No. 4718

APPARATUS AND METHOD FOR MEASURING THE OUTGASSING AND EUV LITHOGRAPHY APPARATUS

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2014-09-29 ABN Abandonment 2 View
2014-03-21 CTFR Final Rejection 20 View
2014-03-21 FWCLM Index of Claims 1 View
2014-01-08 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2014-01-08 CLM Claims 8 View
2014-01-08 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2014-01-08 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-01-08 WFEE Fee Worksheet (SB06) 1 View
2013-10-08 CTNF Non-Final Rejection 21 View
2013-10-08 SRNT Examiner's search strategy and results 4 View
2013-10-08 FWCLM Index of Claims 1 View
2013-10-08 SRFW Search information including classification, databases and other search related notes 1 View
2013-10-08 1449 List of References cited by applicant and considered by examiner 4 View
2013-10-08 1449 List of References cited by applicant and considered by examiner 4 View
2013-10-02 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2013-10-02 FOR Foreign Reference 28 View
2013-10-02 FOR Foreign Reference 48 View
2013-10-02 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-08-24 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2012-08-24 FOR Foreign Reference 18 View
2012-08-24 FOR Foreign Reference 23 View
2012-08-24 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-08-26 RCEX Request for Continued Examination (RCE) 1 View
2011-08-26 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2011-08-26 SPEC Specification 6 View
2011-08-26 ABST Abstract 1 View
2011-08-26 CLM Claims 8 View
2011-08-26 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2011-08-26 WFEE Fee Worksheet (SB06) 1 View
2011-08-26 WFEE Fee Worksheet (SB06) 2 View
2011-08-26 N417 Electronic Filing System Acknowledgment Receipt 3 View
2011-08-26 WFEE Fee Worksheet (SB06) 1 View
2011-04-26 CTFR Final Rejection 17 View
2011-04-26 FWCLM Index of Claims 1 View
2011-04-26 SRFW Search information including classification, databases and other search related notes 1 View
2011-02-10 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2011-02-10 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2011-02-10 DRW Drawings-only black and white line drawings 1 View
2011-02-10 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2011-02-10 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-02-10 WFEE Fee Worksheet (SB06) 1 View
2011-02-10 CLM Claims 6 View
2010-11-16 CTNF Non-Final Rejection 11 View
2010-11-16 892 List of references cited by examiner 1 View
2010-11-16 SRFW Search information including classification, databases and other search related notes 1 View
2010-11-16 FWCLM Index of Claims 1 View
2010-11-16 BIB Bibliographic Data Sheet 1 View
2010-11-16 SRNT Examiner's search strategy and results 3 View
2010-11-16 FOR Foreign Reference 13 View
2010-05-21 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2010-05-21 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2010-05-06 NTC.PUB Notice of Publication 1 View
2010-05-05 PA.. Power of Attorney 13 View
2010-05-05 TRAN.LET Transmittal Letter 1 View
2010-01-26 APP.FILE.REC Filing Receipt 3 View
2010-01-15 PEFR Applicant Response to Pre-Exam Formalities Notice 2 View
2010-01-15 XT/ Extension of Time 1 View
2010-01-15 OATH Oath or Declaration filed 8 View
2010-01-15 WFEE Fee Worksheet (SB06) 2 View
2010-01-15 N417 Electronic Filing System Acknowledgment Receipt 2 View
2009-09-16 NTC.MISS.PRT Notice to File Missing Parts 2 View
2009-09-16 APP.FILE.REC Filing Receipt 3 View
2009-09-03 FRPR Certified Copy of Foreign Priority Application 19 View
2009-09-03 TRAN.LET Transmittal Letter 3 View
2009-09-02 TRNA Transmittal of New Application 1 View
2009-09-02 ADS Application Data Sheet 5 View
2009-09-02 DRW.NONBW Drawings-other than black and white line drawings 5 View
2009-09-02 N417 Electronic Filing System Acknowledgment Receipt 2 View
2009-09-02 SCORE Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) 1 View
2009-09-02 SPEC Specification 14 View
2009-09-02 CLM Claims 3 View
2009-09-02 ABST Abstract 1 View
2009-09-02 WFEE Fee Worksheet (SB06) 1 View
0001-01-03 DRW.SUPP Drawings-black and white line and/or other drawings — View
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Quick Facts
App. No.
12/552,483
Filed
2009-09-02
Pub. No.
US20100112494A1
Art Unit
1777