Manufacturing apparatus of polycrystalline silicon
A manufacturing apparatus of polycrystalline silicon products polycrystalline silicon by depositing on a surface of a silicon seed rod by supplying raw-material gas to the heated silicon seed rod provided vertically in a reactor, includes: an electrode which holds the silicon seed rod and is made of carbon; an electrode holder which holds the electrode, and cooled by coolant medium flowing therein, wherein the electrode includes: a seed rod holding member which holds the silicon seed rod; a heat cap which is provided between the seed rod holding member and the electrode holder; and a cap protector having a ring-like plate shape, which covers an upper surface of the heat cap, and in which a through hole penetrating the lower-end portion of the seed rod holding member is formed.
1. A manufacturing apparatus of polycrystalline silicon by supplying raw-material gas to a heated silicon seed rod provided vertically in a reactor so as to deposit the polycrystalline silicon on a surface of the silicon seed rod, the manufacturing apparatus comprising:
an electrode which holds the silicon seed rod and is made of carbon; and
an electrode holder made of stainless steel, which is inserted and held in a through hole formed on a bottom plate portion of the reactor, which has a threaded shaft portion having a male screw and which holds the electrode,
wherein a coolant passage in which coolant medium flows therein is formed in the electrode holder, and
wherein the electrode comprises:
a columnar seed rod holding member which holds a lower-end portion of the silicon seed rod;
a heat cap which is provided between the seed rod holding member and the electrode holder, and which has a first hollow portion formed on an upper surface thereof, in which a lower-end portion of the seed rod holding member is inserted so as to be held therein and a second hollow portion formed on a lower surface thereof and having a female screw which screws together with the male screw of the threaded shaft portion of the electrode holder; and
a cap protector having a ring-like plate shape, which covers an upper surface of the heat cap, and in which a through hole penetrated by the seed rod holding member is formed,
wherein a male screw portion is formed on an outer peripheral surface of the seed rod holding member, and a female screw which screws together with the male screw portion is formed on an inner peripheral surface of the hollow portion of the heat cap, so that the male screw portion of the seed rod holding member is in surface contact with the female screw of the heat cap, and
wherein a maximum outer diameter of the heat cap is larger than a maximum diameter of the seed rod holding member and substantially the same as a maximum diameter of the electrode holder at an exposed part in the reactor.
2. The manufacturing apparatus of polycrystalline silicon according to claim 1 , wherein a screw which screws together with the male screw portion is formed on an inner peripheral surface of the through hole of the cap protector.
3. The manufacturing apparatus of polycrystalline silicon according to claim 1 , wherein the second hollow portion formed on the lower surface of the heat cap is in contact with an upper end surface of the electrode holder at a bottom surface thereof.
4. The manufacturing apparatus of polycrystalline silicon according to claim 1 , wherein a bottom surface of the first hollow portion is kept away from a bottom surface of the second hollow portion.