Semiconductor device
View Patent ↗A method of manufacturing a semiconductor device according to the present invention includes the steps of introducing first impurities of a first conductivity type into a main surface of a semiconductor substrate 1 to form a first impurity region, introducing second impurities of a second conductivity type to form a second impurity region, forming a first nickel silicide film on the first impurity region and forming a second nickel silicide film on the second impurity region, removing an oxide film formed on each of the first and second nickel silicide films by using a mixed gas having an NH 3 gas and a gas containing a hydrogen element mixed therein, and forming a first conducting film on the first nickel silicide film and forming a second conducting film on the second nickel silicide film, with the oxide film removed.
1. A semiconductor device, comprising:
a first impurity region formed in a first portion of a main surface of a semiconductor substrate;
a second impurity region formed in a second portion of the main surface of said semiconductor substrate;
a first nickel silicide film formed on the first portion of the main surface of said semiconductor substrate, said first impurity region being located in the first portion;
a second nickel silicide film formed on the second portion of the main surface of said semiconductor substrate, said second impurity region being located in the second portion,
a first conducting film formed on said first nickel silicide film, and
a second conducting film formed on said second nickel silicide film, wherein
a difference between a thickness of said first nickel silicide film under a first contact portion between said first conducting film and said first nickel silicide film, and a thickness of said first nickel silicide film on a periphery of said first contact portion is set to be at most 10 nm, and
a difference between a thickness of said second nickel silicide film under a second contact portion between said second conducting film and said second nickel silicide film, and a thickness of said second nickel silicide film on a periphery of said second contact portion is set to be at most 10 nm
wherein
a difference between a thickness of said first nickel silicide film and a thickness of said second nickel silicide film is set to be at most 10 nm.
2. A semiconductor device, comprising:
a first gate electrode formed on a main surface of a semiconductor substrate and having first impurities of a first conductivity type introduced thereinto;
a second gate electrode formed on the main surface of said semiconductor substrate and having second impurities of a second conductivity type introduced thereinto, the second conductivity type being different from said first conductivity type;
a first nickel silicide film formed on said first gate electrode;
a second nickel silicide film formed on said second gate electrode;
a first conducting film formed on said first nickel silicide film; and
a second conducting film formed on said second nickel silicide film, wherein
a difference between a thickness of said first nickel silicide film and a thickness of said second nickel silicide film is set to be at most 10 nm
wherein
a difference between a thickness of said first nickel silicide film under a first contact portion between said first nickel silicide film and said first conducting film, and a thickness of said first nickel silicide film on a periphery of said first contact portion is set to be at most 10 nm, and
a difference between a thickness of said second nickel silicide film under a second contact portion between said second nickel silicide film and said second conducting film, and a thickness of said second nickel silicide film on a periphery of said second contact portion is set to be at most 10 nm.