Probe mark inspection

1. A method of creating a recipe involving creating one or more inspection result images, each inspection result image being based on a unique image characteristic or a unique combination of image characteristics, whereafter each of the one or more inspection result images are correlated with a reference created to determine which image characteristic or combination of image characteristics provides an improved contrast that is at least a partial basis for the inspection of substrates that is conducted using subsequently obtained inspection images.

2. The method of claim 1 wherein the recipe is automatically modified to reflect the use of the identified image characteristic or combination.

3. The method of claim 1 further comprising identifying a degree of correlation between the one or more inspection result images and the reference.

4. The method of claim 3 further comprising generating a score for the degree based on a pixel by pixel comparison of the one or more inspection result images and the reference.

5. The method of claim 1 further comprising assigning different weights to different image characteristics or combinations.

6. The method of claim 1 further comprising iteratively modifying the recipe based on a plurality of inspections.

7. The method of claim 1 further comprising using an optical inspection system configured to identify a feature as a function of the recipe.

8. An optical inspection method for analyzing contact between conductive probes and bond pads on a semiconductor device, comprising:

obtaining one or more representative images of the bond pads and creating one or more inspection result images from the one or more representative images, each inspection result image being based on a unique image characteristic or a unique combination of image characteristics, whereafter each of the one or more inspection result images are scored with respect to a reference created to determine which image characteristic or combination of image characteristics provides an improved contrast that may form at least a partial basis for the subsequent inspection of substrates that is conducted using subsequently obtained inspection images, the at least partial basis comprising part of a recipe for inspection of probe marks on a bond pad;

accessing an image of the bond pads having probe marks formed thereon;

processing the image according to the recipe for identifying the probe marks;

identifying locations for the probe marks from the processed image; and

determining potential adjustments between the conductive probes and the semiconductor device as a function of the locations of the probe marks.

9. The method of claim 8 wherein the predetermined recipe includes converting the image from a color image to a grayscale image.

10. The method of claim 8 wherein the predetermined recipe includes comparing pixel intensity values to a threshold.

11. The method of claim 8 wherein the predetermined recipe includes applying an erode algorithm to the image.

12. The method of claim 11 wherein the predetermined recipe includes applying a second erode algorithm after application of the first-mentioned erode algorithm.

13. The method of claim 8 wherein the predetermined recipe includes applying a dilation algorithm.

14. The method of claim 13 wherein the predetermined recipe includes applying a second dilation algorithm after application of the first-mentioned dilation algorithm.

15. The method of claim 8 further comprising:

positioning the semiconductor device with respect to an optical inspection system; and

capturing the image using the optical inspection system.

16. The method of claim 15 further comprising:

transferring the image from the optical inspection system to a processing element; and

utilizing the processing element to process the image according to the recipe.

17. The method of claim 8 further comprising modifying the predetermined recipe based on identification of the probe marks.