MOS solid-state image pickup device
View Patent ↗A solid-state image pickup device relating to the present invention has a specific gap in a part of a lattice-shaped light blocking film pattern or wiring pattern having an opening enclosing a light reception region. Peripheral circuits and wiring layers on a pixel may be used as the light blocking film. In such a case, when multiple wiring layers are used as the light blocking film, layouts of a second and subsequent wiring layers is determined according to the layout of the first wiring layer above the light reception region. The specific gap is created in a part of the wiring enclosing the light reception region.
1. A solid-state image pickup device including:
a two-dimensional array of multiple pixel cells each having a photodiode, a floating diffusion formed in a semiconductor substrate, and a reading gate and a reset gate which are disposed on the semiconductor substrate;
an interlayer insulating film formed on the semiconductor substrate, the reading gate and the reset gate; and
a light blocking film formed on the interlayer insulating film, wherein:
the light blocking film is formed in a form of a lattice pattern having a plurality of horizontal patterns and vertical patterns and enclosing the photodiode and has an opening directly above the photodiode in each of the pixel cells, and
the light blocking film has a gap provided at a part of the lattice pattern to partially divide the lattice pattern.
2. The solid-state image pickup device according to claim 1 , wherein an underlaying film is provided in a region between a photodiode and an adjacent photodiode below the light blocking film.
3. The solid-state image pickup device according to claim 2 , wherein the underlaying film is provided directly below said light blocking film.
4. The solid-state image pickup device according to claim 2 , wherein the underlaying film is a wiring layer.
5. The solid-state image pickup device according to claim 3 , wherein the underlaying film is a wiring layer.
6. The solid-state image pickup device according to claim 2 , wherein the underlaying film is a gate wiring of a drive transistor.
7. The solid-state image pickup device according to claim 3 , wherein the underlaying film is a gate wiring of a drive transistor.
8. The solid-state image pickup device according to claim 1 , wherein a pair of the gaps is provided on a diagonal line in one pixel cell.
9. The solid-state image pickup device according to claim 1 , wherein the gap has a skewed shape in relation to the lattice pattern.
10. The solid-state image pickup device according to claim 1 , wherein the gap is 1/10 of a side of the pixel cell or larger in size.