Assemblies comprising magnetic elements and magnetic barrier or shielding
View Patent ↗The invention includes a method of forming a semiconductor construction, such as an MRAM construction. A block is formed over a semiconductor substrate. First and second layers are formed over the block, and over a region of the substrate proximate the block. The first and second layers are removed from over the block while leaving portions of the first and second layers over the region proximate the block. At least some of the first layer is removed from under the second layer to form a channel over the region proximate the block. A material, such as a soft magnetic material, is provided within the channel. The invention also includes semiconductor constructions.
1. An assembly, comprising:
a magnetic memory element; the magnetic memory element comprising three layers; the three layers being a first layer corresponding to a magnetic material, a second layer corresponding to a non-magnetic material, and a third layer corresponding to another magnetic material; the magnetic memory element having a vertical sidewall that extends along the first, second and third layers; the first, second and third layers being coplanar along said vertical sidewall; the vertical sidewall extending entirely around the magnetic memory element, and thus defining a lateral periphery of the magnetic memory element; and
a magnetic barrier material laterally offset from lateral periphery of the magnetic memory element and vertically overlapping two of the three layers of the magnetic memory element.
2. The assembly of claim 1 wherein the at least one of the first and third layers comprises a soft magnetic material.
3. The assembly of claim 1 wherein the first and third layers comprise soft magnetic materials.
4. The assembly of claim 1 wherein the magnetic barrier material is laterally offset from the lateral periphery of the magnetic memory element by at least one electrically insulative material.
5. An assembly, comprising:
a magnetic memory element; the magnetic memory element comprising a vertical stack of three structures; the three structures being a first structure corresponding to a magnetic substance, a second structure corresponding to a non-magnetic substance, and a third structure corresponding to another magnetic substance; the magnetic memory element having a vertical sidewall along the first, second and third structures; the first, second and third structures being coplanar along said vertical sidewall; and
a magnetic shield extending along the magnetic memory element; the magnetic shield vertically overlapping two of the three structures of the magnetic memory element.
6. The assembly of claim 5 wherein the at least one of the first and third structures corresponds to a soft magnetic substance.
7. An assembly, comprising:
a magnetic memory element;
a first layer, a second layer, and a third layer proximate the magnetic memory element, the second layer being recessed relative to the first and third layers to define a channel that extends around the periphery of the magnetic memory element; wherein the second layer comprises silicon dioxide; wherein the first and third layers comprise silicon nitride or silicon carbide; and
a magnetic barrier material extending substantially around a periphery of the magnetic memory element, the magnetic barrier material extending within said channel.
8. The assembly of claim 7 wherein the third layer comprises silicon nitride.
9. The assembly of claim 7 wherein the first and third layers comprise silicon nitride.
10. The assembly of claim 7 wherein the first and third layers comprise silicon carbide.
11. An assembly, comprising:
a magnetic memory element;
a first layer, a second layer, and a third layer proximate the magnetic memory element, the second layer being recessed relative to the first and third layers to define a channel that extends around the periphery of the magnetic memory element; wherein the first and third layers comprise silicon carbide; wherein the second layer does not comprise silicon carbide; and
a magnetic barrier material extending substantially around a periphery of the magnetic memory element, the magnetic barrier material extending within said channel.
12. An assembly, comprising:
a magnetic memory element laterally surrounded by one or more materials; wherein the one or more materials include a first, second and third layer; wherein the second layer comprises silicon dioxide; and wherein the first and third layers comprise silicon nitride or silicon carbide;
a channel within the one or more materials and laterally surrounding the magnetic memory element, the second layer being recessed relative to the first and third layers to define the channel; and
a magnetic shield extending within the channel and laterally surrounding the magnetic memory element.
13. The assembly of claim 12 wherein the third layer comprises silicon nitride.
14. The assembly of claim 12 wherein the first and third layers comprise silicon nitride.
15. The assembly of claim 12 wherein the first and third layers comprise silicon carbide.
16. An assembly, comprising:
a magnetic memory element laterally surrounded by one or more materials; wherein the one or more materials include a first, second and third layer; wherein the second layer does not comprise silicon carbide; and wherein the first and third layers comprise silicon carbide;
a channel within the one or more materials and laterally surrounding the magnetic memory element, the second layer being recessed relative to the first and third layers to define the channel; and
a magnetic shield extending within the channel and laterally surrounding the magnetic memory element.