Circuit board and semiconductor device
View Patent ↗A semiconductor device, includes: a semiconductor substrate; a multilayered interconnect structure formed on the semiconductor substrate; a terminal for flip-chip packaging arranged on the surface of the multilayered interconnect structure; and a spiral inductor formed to enclose the terminal for flip-chip packaging, in a plan view, which is not electrically connected with the spiral inductor. The spiral inductor may be provided for peaking by which the gain reduction caused in a high frequency is compensated.
1. A semiconductor device, comprising:
a semiconductor substrate;
a multilayered interconnect structure formed on said semiconductor substrate;
a terminal for packaging arranged on the surface of said multilayered interconnect structure; and
a spiral inductor formed to enclose said terminal for packaging, in a plan view, which is not electrically connected with said spiral inductor,
wherein said spiral inductor is connected to said multilayered interconnect structure.
2. The semiconductor device according to claim 1 , wherein said spiral inductor and terminal for packaging are formed in different layers of said multilayered interconnect structure with each other.
3. The semiconductor device according to claim 1 , wherein said spiral inductor is formed over a plurality of layers of said multilayered interconnect structure.
4. The semiconductor device according to claim 2 , wherein said spiral inductor is formed over a plurality of layers of said multilayered interconnect structure.
5. The semiconductor device according to claim 1 , further comprising a resistance, said spiral inductor being connected to said resistance.
6. The semiconductor device according to claim 2 , further comprising a resistance, said spiral inductor being connected to said resistance.
7. The semiconductor device according to claim 1 , wherein said spiral inductor is provided for peaking by which the gain reduction caused in a high frequency is compensated.
8. The semiconductor device according to claim 2 , wherein said spiral inductor is provided for peaking by which the gain reduction caused in a high frequency is compensated.
9. The semiconductor device according to claim 1 , wherein said terminal for packaging is connected to a connection structure including a plurality of interconnects and vias alternately connected with each other and formed over a plurality of layers of said multilayered interconnect structure.
10. The semiconductor device according to claim 2 , wherein said terminal for packaging is connected to a connection structure including a plurality of interconnects and vias alternately connected with each other and formed over a plurality of layers of said multilayered interconnect structure.
11. A circuit board, comprising:
a substrate;
a terminal for packaging arranged on the surface of said substrate; and
a spiral inductor formed to enclose said terminal for packaging, in a plan view, which is not electrically connected with said spiral inductor.
12. The circuit board according to claim 11 , further comprising a plurality of terminals for packaging including said terminal for packaging which is enclosed by said spiral inductor, wherein said plurality of terminals for packaging are arranged on the surface of said substrate in a plan view.
13. The circuit board according to claim 12 , further comprising a plurality of spiral inductors formed so that each of said plurality of spiral inductors encloses at least one of said terminals for packaging in a plan view.
14. The circuit board according to claims 11 , said spiral inductor is provided for peaking by which the gain reduction caused in a high frequency is compensated.
15. The circuit board according to claims 12 said spiral inductor is provided for peaking by which the gain reduction caused in a high frequency is compensated.
16. The circuit board according to claims 13 , said spiral inductor is provided for peaking by which the gain reduction caused in a high frequency is compensated.
17. The circuit board according to claim 11 , wherein a plurality of through electrodes are provided in said substrate and one end of each of which is serves as said terminal for packaging, said spiral inductor being connected to one of said through electrodes.
18. A semiconductor device, comprising:
a semiconductor substrate;
a first multilayered interconnect structure formed on said semiconductor substrate;
a terminal for packaging arranged on the surface of said first multilayered interconnect structure, said terminal for packaging being connected to said first multilayered interconnect structure; and
a spiral inductor formed to enclose said terminal for packaging, in a plan view, said spiral inductor not being electrically connected to said terminal and said first multilayered interconnect structure.
19. The semiconductor device according to claim 18 , wherein said spiral inductor is formed over a second multilayered interconnect structure that is not electrically connected to said first multilayered interconnect structure and said
spiral inductor is connected to said second multilayered interconnect structure.
20. The semiconductor device according to claim 19 , further comprising a resistance, said spiral inductor being connected to said resistance through said second multilayered interconnect structure.