Microfluidic valve having free-floating member and method of fabrication
Micro check valves having a free-floating member for controlling flow of fluid in microfluidic and biomedical applications and methods of fabrication. A micro check valve includes a valve seat, a valve cap that contacts the valve seat and an untethered floating member that can move between the valve seat and the valve cap. Certain micro check valves have zero cracking pressure and no reverse leakage. Certain other valves may be configured to permit flow of fluid within a pressure range. The floating member can be solid or define an orifice, and the valve seat can have one or two levels. Valves can be configured to allow fluid to flow when the floating member is pushed by fluid against the valve cap or against the valve seat. The valve seat may be silicon or another material that is compatible with micromachining processes, and the valve cap and the floating member may be a polymer such as Parylene.
1. A method of fabricating a micro check valve having a floating member for controlling flow of fluid, the method comprising:
depositing a plurality of polymer layers and a plurality of sacrificial layers on a substrate in an alternating manner, the substrate comprising a multi-level valve seat, the plurality of polymer layers including a first polymer layer comprising the floating member, a second polymer layer comprising a valve cap, and a third polymer layer comprising an outer wall defining a fluid channel; and
removing the plurality of sacrificial layers, thereby forming an in-channel microfluidic valve having a floating polymer member that is movable between the valve seat and the polymer valve cap by application of pressure on the floating member by a fluid to passively control flow of the fluid through the multi-level valve seat and the valve cap, wherein the multi-level valve seat, the valve cap and the floating member are configured to permit flow of the fluid when the fluid pressure is between a threshold pressure and a cut-off pressure and to stop flow of the fluid when the fluid pressure exceeds the cut-off pressure.
2. The method of claim 1 , further comprising forming the multi-level valve seat.
3. The method of claim 2 , wherein forming the multi-level valve seat comprises patterning and etching a substrate wafer.
4. The method of claim 1 , wherein the valve seat comprises silicon.
5. The method of claim 1 , wherein the polymer comprises parylene.
6. The method of claim 1 , further comprising patterning at least one of the polymer or sacrificial layers.
7. The method of claim 1 , wherein the sacrificial layers are removed by stripping with acetone.
8. A method of fabricating a micro check valve having a floating member for controlling flow of fluid, the method comprising:
depositing a plurality of polymer layers and a plurality of sacrificial layers on a substrate in an alternating manner, the substrate comprising a multi-level valve seat having a first surface at a first level and a second surface at a second, lower level, the plurality of polymer layers including a first polymer layer comprising the floating member, a second polymer layer comprising a valve cap, and a third polymer layer comprising an outer wall defining a fluid channel; and
removing the plurality of sacrificial layers, thereby forming an in-channel microfluidic valve having a floating polymer member that is movable between the valve seat and the polymer valve cap by application of pressure on the floating member by a fluid to passively control flow of the fluid through the multi-level valve seat and the valve cap, wherein the valve seat defines a fluid port and at least one fluid channel in fluid communication with the fluid port, and the floating member can bend under fluid pressure between a flat shape for temporarily sealing the at least one fluid channel and an arcuate shape.
9. The method of claim 8 , further comprising forming the multi-level valve seat.
10. The method of claim 9 , wherein forming the multi-level valve seat comprises patterning and etching a substrate wafer.
11. The method of claim 8 , wherein the valve seat comprises silicon.
12. The method of claim 8 , wherein the polymer comprises parylene.
13. The method of claim 8 , further comprising patterning at least one of the polymer or sacrificial layers.
14. The method of claim 8 , wherein the sacrificial layers are removed by stripping with acetone.