Image sensor and method for manufacturing the same
View Patent ↗Provided is an image sensor that comprises a readout circuitry, an interlayer dielectric, an interconnection, an image sensing device, an ion implantation region, a contact, and a pixel separation layer. The readout circuitry is disposed at a first substrate. The interlayer dielectric is disposed on the first substrate. The interconnection is disposed in the interlayer dielectric, and electrically connected to the readout circuitry. The image sensing device is disposed on the interconnection, and comprises a first conductive type layer and a second conductive type layer. The contact electrically connects the first conductive type layer of the image sensing device and the interconnection. The ion implantation region is formed in the second conductive type layer at a region corresponding to the contact. The pixel separation layer is disposed at a pixel boundary of the image sensing device.
1. An image sensor comprising:
a readout circuitry at a first substrate;
an interlayer dielectric on the first substrate;
an interconnection in the interlayer dielectric, the interconnection being electrically connected to the readout circuitry;
an image sensing device on the interconnection, the image sensing device comprising a first conductive type layer and a second conductive type layer;
a contact electrically connecting the first conductive type layer of the image sensing device and the interconnection, wherein the contact is disposed in a trench penetrating the image sensing device to expose the interconnection;
an ion implantation region in the second conductive type layer; and
a pixel separation layer at a pixel boundary of the image sensing device,
wherein the ion implantation region comprises a first conductive type ion implantation region, the first conductive type on implantation region separating the contact and the second conductive type layer.
2. The image sensor according to claim 1 , wherein the contact comprises:
a barrier metal layer on a surface of the trench; and
a contact plug on the barrier metal layer, the contact plug filling the trench.
3. The image sensor according to claim 1 , wherein the ion implantation region has the same depth as that of the second conductive type layer disposed on an upper side of the interconnection.
4. The image sensor according to claim 1 , wherein the ion implantation region has a depth greater than that of the second conductive type layer disposed on an upper side of the interconnection.
5. The image sensor according to claim 1 , further comprising an electrical junction region electrically connected to the readout circuitry at the first substrate.
6. The image sensor according to claim 5 , wherein the readout circuitry comprises a transistor, wherein the electrical junction region is disposed at the source of the transistor, whereby a potential difference is provided between the source and a drain of the transistor.
7. The image sensor according to claim 5 , further comprising a first conductive type connection between the electrical junction region and the interconnection to electrically connect the electrical junction region and the interconnection,
wherein the first conductive type connection is disposed at an upper part of the electrical junction region.
8. The image sensor according to claim 5 , further comprising a first conductive type connection between the electrical junction region and the interconnection to electrically connect the electrical junction region and the interconnection,
wherein the first conductive type connection is disposed at a side of the electrical junction region.