Method for manufacturing perpendicular magnetic recording medium
View Patent ↗There is provided a method for manufacturing a perpendicular magnetic recording medium that includes a step for forming a smooth substrate surface without generating abnormal protrusions or the like when forming a magnetic film or the like on the surface of the substrate, the method for manufacturing a perpendicular magnetic recording medium characterized by including a polishing step in which the surface of a non-magnetic substrate is smoothed before forming the laminated structure on top of the non-magnetic substrate, wherein a polishing liquid used in the polishing step contains diamond particles within a range from 0.001 to 0.05% by mass and also contains a polishing accelerator within a range from 10 to 100 times the amount of diamond particles, and the polishing accelerator is an organic polymer material containing a sulfonic group or a carboxylic group and having an average molecular weight of 4,000 to 10,000.
1. A method for manufacturing a perpendicular magnetic recording medium which is a method for manufacturing a perpendicular magnetic recording medium by forming a laminated structure containing a soft magnetic layer and a perpendicular magnetic layer on top of a non-magnetic substrate, the method comprising:
a polishing step in which the surface of a non-magnetic substrate is smoothed before forming the laminated structure on top of the non-magnetic substrate,
wherein a polishing liquid used in the polishing step contains abrasive grains consisting essentially of diamond particles within a range from 0.001 to 0.05% by mass and also contains a polishing accelerator within a range from 10 to 100 times the mass amount of diamond particles, and
the polishing accelerator is an organic polymer material containing a sulfonic group or a carboxylic group and having an average molecular weight of 4,000 to 10,000.
2. The method for manufacturing a perpendicular magnetic recording medium according to claim 1 ,
wherein time from the completion of the polishing step until formation of the laminated structure on top of the non-magnetic substrate is within 10 hours.
3. The method for manufacturing a perpendicular magnetic recording medium according to claim 1 ,
wherein the diamond particles are cluster diamond particles and primary particle size of the diamond particles is within a range from 1 nm to 10 nm whereas secondary particle size of the diamond particles is within a range from 50 nm to 100 nm.
4. The method for manufacturing a perpendicular magnetic recording medium according to claim 1 ,
wherein the polishing accelerator having a sulfonic group or a carboxylic group is a polishing accelerator having sodium sulfonate or sodium carboxylate.
5. The method for manufacturing a perpendicular magnetic recording medium according to claim 1 , wherein the non-magnetic substrate is a glass substrate.
6. The method for manufacturing a perpendicular magnetic recording medium according to claim 2 ,
wherein the diamond particles are cluster diamond particles and primary particle size of the diamond particles is within a range from 1 nm to 10 nm whereas secondary particle size of the diamond particles is within a range from 50 nm to 100 nm.
7. The method for manufacturing a perpendicular magnetic recording medium according to claim 2 , wherein the polishing accelerator having a sulfonic group or a carboxylic group is a polishing accelerator having sodium sulfonate or sodium carboxylate.
8. The method for manufacturing a perpendicular magnetic recording medium according to claim 3 , wherein the polishing accelerator having a sulfonic group or a carboxylic group is a polishing accelerator having sodium sulfonate or sodium carboxylate.
9. The method for manufacturing a perpendicular magnetic recording medium according to claim 2 , wherein the non-magnetic substrate is a glass substrate.
10. The method for manufacturing a perpendicular magnetic recording medium according to claim 3 , wherein the non-magnetic substrate is a glass substrate.
11. The method for manufacturing a perpendicular magnetic recording medium according to claim 4 , wherein the non-magnetic substrate is a glass substrate.
12. The method for manufacturing a perpendicular magnetic recording medium according to claim 1 , wherein the polishing liquid contains diamond particles within a range from 0.001 to 0.01% by mass.