Semiconductor device
View Patent ↗A field-effect transistor ( 142 ) includes a lowly p-doped region 110 formed on a surface of a substrate ( 102 ), an n-doped drain region 112 and n-doped source region 114 arranged on a surface of the lowly p-doped region 110 , and a device isolation insulating film 132 and device isolation insulating film 134 . Here, the device isolation insulating film 132 is formed greater in film thickness than the device isolation insulating film 134 ; and in the n-doped source region 114 , the peak concentration section having a highest dopant concentration is formed in a deeper position than in the n-doped drain region 112.
1. A semiconductor device, comprising:
a lowly doped region of a first conduction type formed in a substrate;
a channel region arranged in the lowly doped region of the first conduction type;
a gate electrode formed over the channel region;
a drain region of a second conduction type formed in a part of the surface of the lowly doped region of the first conduction type;
a drain electrode formed within the drain region of the second conduction type;
a source region of the second conduction type formed in a part of the surface of the lowly doped region of the first conduction type and formed in a region facing the drain region of the second conduction type so that the channel region lies between the source region and the drain region;
a source electrode formed within the source region of the second conduction type;
a first device isolation film lying between the channel region and the drain electrode and formed within the drain region of the second conduction type; and
a second device isolation film lying between the channel region and the source electrode and formed within the source region of the second conduction type,
wherein the first device isolation film is greater in film thickness than the second device isolation film.
2. The semiconductor device according to claim 1 , wherein the first device isolation film is greater in width than the second device isolation film.
3. The semiconductor device according to claim 1 , wherein a peak concentration position of second-conduction-type dopant in the source region is formed in a deeper position than a peak concentration position of second-conduction-type dopant in the drain region.
4. The semiconductor device according to claim 1 , wherein the first device isolation film is formed so as to divide the drain region on the substrate.
5. The semiconductor device according to claim 1 , wherein the second device isolation film is formed so as to divide the source region on the substrate.
6. The semiconductor device according to claim 1 , wherein the first device isolation film and the second device isolation film are formed between the gate electrode and substrate.