Defect review and classification system
View Patent ↗The invention proposes a system that interrupts a processing associated with an ADC having low priority when an ADC processing cannot catch up with ADR by an ADC alone that is not under execution but uses an ADC for an ADR having high priority. To preferentially execute ADR/ADC having high priority, the invention employs an algorithm for serially selecting ADR/ADC in the order of higher processing capacity (in the order of greater numerical values in the expression by a DPH unit) from among ADR/ADCs that have the lowest priority, no matter whether the ADR/DC is now under execution or not.
1. A defect review and classification system comprising:
at least one automatic defect review apparatus (hereinafter called “ADR apparatus”) for automatically acquiring images of defect portions of sample;
a plurality of defect classification apparatus (hereinafter called “ADC apparatus”) for automatically classifying the defects by using the images obtained by said ADR apparatus in accordance with the kind of defects, which is connected to the ADR apparatus; and
means for displaying a graphical users interface that provides the combination of said ADR apparatus with said ADC apparatus providing the highest through-put of said automatic defect review and classification system.
2. The defect review and classification system according to claim 1 , further comprising:
a scanning electron microscope for providing the images to said ADR apparatus.
3. A defect review and classification system comprising:
at least one automatic defect review apparatus (hereinafter called “ADR apparatus”) for automatically acquiring images of defect portions of sample;
a plurality of defect classification apparatus (hereinafter called “ADC apparatus”) for automatically classifying the defects by using the images obtained by said ADR apparatus in accordance with the kind of defects, which is connected to the ADR apparatus;
means for calculating an estimation value for a time necessary for executing a processing to be executed from now on, based on a past processing history corresponding to a set imaging condition for a function of each of said ADR apparatus and said ADC apparatus; and
means for displaying a graphical users interface that provides said estimated time.
4. The defect review and classification system according to claim 3 , further comprising:
a scanning electron microscope for providing the images to said ADR apparatus.