Image sensor and manufacturing method of image sensor
View Patent ↗An image sensor includes a trench formed in a semiconductor substrate, a first reflection part formed in the trench and having an inclined, curved surface, a second reflection part formed on the first reflection part such that a remaining space of the trench is filled with the second reflection part, and a vertical type photodiode formed on a region of the substrate between trenches. A method for forming the image sensor includes forming a trench in a semiconductor substrate, forming a first reflection part having an inclined, curved surface in the trench, forming a second reflection part on the first reflection part such that a remaining space of the trench is filled with the second reflection part, and forming a vertical type photodiode on a region of the substrate between trenches.
1. An image sensor comprising:
a semiconductor substrate defining a trench;
a first reflection part formed in the trench and having an inclined, curved surface;
a second reflection part formed over the first reflection part such that a remaining space of the trench is filled with the second reflection part; and
a vertical type photodiode formed in a region of the substrate adjacent the trench.
2. The image sensor of claim 1 , wherein the trench is formed in a P-type epitaxial layer on which the photodiode is formed later.
3. The image sensor of claim 1 , wherein the first reflection part includes at least one of poly arylene ether and polyimide, and the second reflection part includes SiO 2 .
4. The image sensor of claim 1 , including:
a transfer transistor gate formed at a first lateral side of a reflection area including the first and second reflection parts such that the transfer transistor gate is connected to the photodiode formed at the first lateral side of the reflection area;
a plurality of transistors provided at a second lateral side of the reflection area, in which the second lateral side is adjacent to the first lateral side where the photodiode is formed; and
a floating diffusion layer formed on a region of the semiconductor substrate between the transistors and the gate.
5. The image sensor of claim 1 , wherein two reflection areas, two photodiodes and two transfer transistors are provided to constitute a unit pixel, and the two transfer transistor gates share a floating diffusion layer formed under the transfer transistor gates.
6. The image sensor of claim 5 , wherein the transistor alternately samples signals, which are generated from the two photodiodes, at a predetermined time interval.