Micro-electro-mechanical device with a piezoelectric actuator
View Patent ↗A micro-electro-mechanical device including a substrate with a main surface, a piezoelectric actuator with a first side mechanically coupled to the substrate, an elastic member with a first end mechanically coupled to the substrate, and a transfer member mechanically coupling a second side of the piezoelectric actuator to the elastic member. The piezoelectric actuator is positioned lateral to an unfixed region of the elastic member. The method includes applying a voltage to a piezoelectric actuator altering the piezoelectric actuator's dimension vertical to the main surface of the substrate; and mechanically transferring the alteration to a coupling point of an elastic member.
1. A micro-electro-mechanical device, comprising:
a substrate with a main surface;
an elastic member with a first end mechanically coupled to the substrate;
a piezoelectric actuator with a first side mechanically coupled to the substrate, said piezoelectric actuator being positioned lateral to an unfixed region of the elastic member; and
a transfer member mechanically coupling a second side of the piezoelectric actuator to the elastic member, wherein the elastic member is elastic in a direction vertical to the main surface of the substrate, wherein the first side of the elastic member is averted from the substrate, wherein the elastic member is a cantilever, wherein the elastic member comprises at least one of a notch, a groove, and a recess, wherein the transfer member is mechanically coupled to a first side of the elastic member, wherein the transfer member is coupled to a coupling point of the elastic member, and wherein the coupling point is remote from the first end of the elastic member.
2. The micro-electro-mechanical device according to claim 1 , wherein said at least one of a notch, a groove, and a recess is between points of attachment of (i) elastic member and the substrate and (ii) elastic member and the transfer member.
3. The micro-electro-mechanical device according to claim 1 , wherein a capacitor electrode of a capacitor is mechanically coupled to the elastic member.
4. The micro-electro-mechanical device according to claim 3 , wherein the micro-electro-mechanical device comprises an electric switch, wherein a contact of the electric switch is mechanically coupled to the elastic member.
5. The micro-electro-mechanical device according to claim 4 , wherein the micro-electro-mechanical device comprises a fluid valve with a valve member mechanically coupled to the elastic member.
6. The micro-electro-mechanical device according to claim 5 , wherein:
the micro-electro-mechanical device comprises an optic switch or variable optic attenuator with two wave guides; and
an end of one of the wave guides is mechanically coupled the elastic member.
7. The micro-electro-mechanical device according to claim 6 , wherein the transfer member comprises:
a bar arranged essentially parallel to the main surface of the substrate and a stud arranged essentially vertical to the main surface of the substrate.
8. The micro-electro-mechanical device according to claim 7 , wherein a first end of the bar is at the second side of the piezoelectric actuator.
9. The micro-electro-mechanical device according to claim 8 , wherein a second end of the bar is at a first end of the stud.
10. The micro-electro-mechanical device according to claim 9 , wherein a second end of the stud is at the elastic member.
11. A micro-electro-mechanical device, comprising:
a substrate with a main surface;
an elastic member with a first end mechanically coupled to the substrate;
a piezoelectric actuator with a first side mechanically coupled to the substrate, said piezoelectric actuator being positioned lateral to an unfixed region of the elastic member; and
a transfer member mechanically coupling a second side of the piezoelectric actuator to the elastic member;
wherein the elastic member comprises at least one of a notch, a groove, and a recess; and
wherein said at least one of a notch, a groove, and a recess is between points of attachment of (i) elastic member and the substrate and (ii) elastic member and the transfer member.
12. The micro-electro-mechanical device according to claim 11 , wherein a capacitor electrode of a capacitor is mechanically coupled to the elastic member.
13. The micro-electro-mechanical device according to claim 12 , wherein the micro-electro-mechanical device comprises an electric switch, wherein a contact of the electric switch is mechanically coupled to the elastic member.
14. The micro-electro-mechanical device according to claim 13 , wherein the micro-electro-mechanical device comprises a fluid valve with a valve member mechanically coupled to the elastic member.
15. The micro-electro-mechanical device according to claim 14 , wherein:
the micro-electro-mechanical device comprises an optic switch or variable optic attenuator with two wave guides; and
an end of one of the wave guides is mechanically coupled the elastic member.
16. The micro-electro-mechanical device according to claim 15 , wherein the transfer member comprises:
a bar arranged essentially parallel to the main surface of the substrate and a stud arranged essentially vertical to the main surface of the substrate.
17. The micro-electro-mechanical device according to claim 16 , wherein a first end of the bar is at the second side of the piezoelectric actuator.
18. The micro-electro-mechanical device according to claim 17 , wherein a second end of the bar is at a first end of the stud.
19. The micro-electro-mechanical device according to claim 18 , wherein a second end of the stud is at the elastic member.