Semiconductor device and method for fabricating the same
View Patent ↗A semiconductor device and a method for fabricating the same, including: a substrate having a mounting surface formed with a plurality of bonding fingers and covered with an insulating layer, the insulating layer having an opening formed therein for exposing the bonding fingers; and a chip coupled to the substrate and including a body, a self-adhesive protective layer, and a plurality of bumps protruding from the self-adhesive protective layer. The self-adhesive protective layer is formed on the chip but leaves the bumps exposed. The self-adhesive protective layer is made of a photosensitive adhesive, thermosetting adhesive, or dielectric material. The chip is coupled to the substrate via the self-adhesive protective layer, thus allowing the bumps to be electrically connected to the bonding fingers and at least an end of the opening to be exposed. The method enables a more streamlined manufacturing process and lower fabrication costs by dispensing with adhesive dispensing.
1. A method for fabricating a semiconductor device, comprising the steps of:
(a) providing a chip and a substrate, the chip comprising:
a body having a first surface and an opposing second surface;
a plurality of bumps formed on the first surface; and
a self-adhesive protective layer formed on the first surface of the chip and leaving the bumps exposed, the bumps protruding from the self-adhesive protective layer, wherein the self-adhesive protective layer is made of a photosensitive adhesive, a thermosetting adhesive, or a dielectric material, the substrate having a mounting surface formed with a plurality of bonding fingers thereon and covered with an insulating layer thereon, the insulating layer having an opening formed therein to expose the bonding fingers; and
(b) laminating the chip and the substrate to each other, thereby allowing the self-adhesive protective layer to fill the opening, the chip to be coupled to the substrate via the self-adhesive protective layer, the bumps to be electrically connected to the bonding fingers, and at least an end of the opening to be exposed.
2. The method of claim 1 , wherein the self-adhesive protective layer partly extends to an upper sidewall of the opening.
3. The method of claim 1 , further comprising, upon lamination of the chip and the substrate to each other, providing an adhesive from an end of the opening, spreading the adhesive across the opening between the chip and the substrate, and encapsulating the bumps and the bonding fingers with the adhesive.
4. The method of claim 2 , further comprising, upon lamination of the chip and the substrate to each other, providing an adhesive from an end of the opening, spreading the adhesive across the opening between the chip and the substrate, and encapsulating the bumps and the bonding fingers with the adhesive.
5. The method of claim 1 , further comprising forming on the insulating layer an encapsulant for encapsulating the chip.
6. The method of claim 3 , further comprising forming on the insulating layer an encapsulant for encapsulating the chip.
7. The method of claim 1 , wherein the photosensitive adhesive is cured.
8. The method of claim 1 , wherein the dielectric material is a substance selected from the group consisting of polyimide, silicon dioxide, nitrosilicide, and a combination thereof.
9. The method of claim 1 , wherein the lamination type is one selected from the group consisting of irradiation lamination, heat lamination, and thermal/sound wave lamination.
10. The method of claim 3 , wherein the lamination type is one selected from the group consisting of irradiation lamination, heat lamination, and thermal/sound wave lamination.
11. The method of claim 1 , wherein the bumps are made of a conductive material selected from the group consisting of aluminum, copper, titanium, tin, lead, gold, bismuth, zinc, nickel, zirconium, magnesium, indium, antimony, tellurium, and a combination thereof.
12. The method of claim 3 , wherein the bumps are made of a conductive material selected from the group consisting of aluminum, copper, titanium, tin, lead, gold, bismuth, zinc, nickel, zirconium, magnesium, indium, antimony, tellurium, and a combination thereof.
13. The method of claim 1 , wherein the thermosetting adhesive is cured.
14. The method of claim 3 , wherein the thermosetting adhesive is cured.