Method and Apparatus for Reacting Thin Films on Low-Temperature Substrates at High Speeds
A method for reacting thin films on a low-temperature substrate within a reactive atmosphere is disclosed. The thin film contains a reducible metal oxide, and the reactive atmosphere contains a reducing gas such as hydrogen or methane. The low-temperature substrate can be polymer, plastic or paper. Multiple light pulses from a high-intensity strobe system are used to reduce the metal oxide to metal and to sinter the metal if applicable.
1 . A method for reacting a thin film on a low-temperature substrate, said method comprising:
providing a gaseous atmosphere;
moving a layer of thin film mounted on a low-temperature substrate through said gaseous atmosphere; and
exposing said layer of thin film to a pulsed electromagnetic emission while said layer of thin film is being moved in relation to a source of said pulsed electromagnetic emissions within said gaseous atmosphere to allow said layer of thin film to be chemically reacted with said gaseous atmosphere.
2 . The method of claim 1 , wherein said gaseous atmosphere contains hydrogen.
3 . The method of claim 1 , wherein said gaseous atmosphere contains hydrocarbon gas.
4 . The method of claim 1 , wherein said gaseous atmosphere contains more than one gaseous species.
5 . The method of claim 1 , wherein said thin film is a metal compound containing a metal having a positive reduction potential.
6 . The method of claim 5 , wherein said metal compound is copper oxide.
7 . The method of claim 5 , wherein said metal compound is platinum oxide.
8 . The method of claim 5 , wherein said metal compound is palladium oxide.
9 . The method of claim 1 , wherein said thin film is a metal.
10 . The method of claim 1 , wherein said low-temperature substrate is made of plastic.
11 . The method of claim 1 , wherein said low-temperature substrate is made of paper.
12 . The method of claim 1 , wherein said low-temperature substrate is made of polymer.
13 . A curing apparatus comprising:
an enclosure for providing a gaseous atmosphere;
a strobe head having a flash lamp for providing a pulsed electromagnetic emission to a layer of thin film mounted on a low-temperature substrate to allow said layer of thin film to be chemically reacted with said gaseous atmosphere; and
a conveyor system for moving said layer of thin film within said gaseous atmosphere in relation to said strobe head; and
a strobe control module for controlling power, duration, repetition rate and the number of said pulse electromagnetic emission generated by said flash lamp.
14 . The curing apparatus of claim 13 , wherein said flash lamp is a xenon flash lamp.
15 . The curing apparatus of claim 13 , wherein said low-temperature substrate is moved at a speed that is synchronized with said repetition rate of said pulsed electromagnetic emission.
16 . The curing apparatus of claim 13 , wherein said low-temperature substrate is conveyed by a reel-to-reel system.
17 . The curing apparatus of claim 13 , wherein said gaseous atmosphere contains hydrogen.
18 . The curing apparatus of claim 13 , wherein said gaseous atmosphere contains hydrocarbon gas.
19 . The curing apparatus of claim 13 , wherein said thin film is a metal compound containing a metal having a positive reduction potential.
20 . The curing apparatus of claim 13 , wherein said thin film is a metal.