Semiconductor device and method of manufacturing the same
View Patent ↗A semiconductor device includes: a substrate having first and second surfaces, the first surface comprising first and second regions; a first semiconductor chip covering the first region; a first seal covering the second region and the first semiconductor chip; and a second seal covering the second surface.
1. A semiconductor device comprising:
a substrate including a first surface, a second surface opposite to the first surface, and a plurality of lands formed on the second surface, and the substrate further including a solder resist film formed on the second surface so as to expose the plurality of lands;
a semiconductor chip mounted over the first surface of the substrate, the semiconductor chip being electrically connected to the plurality of lands;
a first seal provided over the first surface of the substrate to cover the semiconductor chip;
a plurality of conductors provided on the plurality of lands of the substrate, respectively;
a second seal provided over substantially an entirety of the solder resist film of the substrate so that parts of the plurality of conductors expose from the second seal; and
a plurality of solder balls connected to the parts of the plurality of conductors,
wherein the first seal comprises first and second edges that are substantially aligned with first and second edges of the second seal, respectively, and the second seal is continuously formed between the first and second edges of the second seal, and
wherein the plurality of conductors have a thickness substantially equal to a thickness of the second seal.
2. The semiconductor device according to claim 1 , wherein the first seal comprises a first insulating resin having a first thermal expansion coefficient,
the second seal comprises a second insulating resin having a second thermal expansion coefficient, and
the first thermal expansion coefficient is nearly equal to the second thermal expansion coefficient.
3. The semiconductor device according to claim 1 , wherein the first seal is thicker than the second seal,
the first seal comprises a first insulating resin having a first thermal expansion coefficient,
the second seal comprises a second insulating resin having a second thermal expansion coefficient, and
the first thermal expansion coefficient is smaller than the second thermal expansion coefficient.
4. The semiconductor device according to claim 1 , wherein the plurality of conductors and the plurality of solder balls comprise a same material.
5. The semiconductor device according to claim 1 , further comprising:
a second semiconductor chip provided over the second surface of the substrate, the second semiconductor chip being covered with the second seal.
6. The semiconductor device according to claim 1 , further comprising:
a third seal covering side surfaces of the substrate, the third seal continuously connecting the first and second seals.
7. The semiconductor device according to claim 1 , wherein a thickness of the first seal from the first surface to a surface of the first seal is different from a thickness of the second seal from the second surface to a surface of the second seal.
8. The semiconductor device according to claim 1 , wherein each of the parts of the plurality of conductors includes a plane surface that is substantially coplanar with a surface of the second seal.
9. The semiconductor device according to claim 1 , wherein each of the lands includes a surface facing to the substrate, and an entire area of the surface of each of the lands is in contact with the second surface.
10. The semiconductor device according to claim 1 , further comprising:
a connection pad formed on the first surface;
a first wire formed in the first seal and electrically connecting the semiconductor chip to the connection pad; and
a wire formed in the substrate and electrically connecting the connection pad to the plurality of lands.
11. The semiconductor device according to claim 1 , wherein the plurality of conductors comprises a copper plating having a thickness of 10 μm or greater.
12. The semiconductor device according to claim 1 , wherein the plurality of conductors comprises a plurality of cylindrical conductors which separate the plurality of solder balls from the plurality of lands.
13. The semiconductor device according to claim 1 , wherein the first and second edges of the first seal and the first and second edges of second seal are substantially aligned with first and second edges of the substrate, respectively.
14. The semiconductor device according to claim 1 , wherein the second seal comprises a central portion that is substantially aligned with a central portion of the semiconductor chip.
15. The semiconductor device according to claim 1 , wherein the second seal comprises a central portion that is substantially aligned with a central portion of the first seal.
16. A semiconductor device comprising:
a substrate including a first surface, a second surface opposite to the first surface, and a plurality of lands formed on the second surface, and the substrate further including a solder resist film formed on the second surface so as to expose the plurality of lands;
a semiconductor chip mounted over the first surface of the substrate;
a first seal provided over the first surface of the substrate to cover the semiconductor chip;
a second seal, comprising a same material as the first seal, provided over the solder resist film of the substrate, the substrate being sandwiched between the first seal and the second seal; and
a plurality of external terminals provided on the plurality of lands of the substrate so that parts of the external terminals protrude from the second seal,
wherein the first seal comprises first and second edges that are substantially aligned with first and second edges of the second seal, respectively, and the second seal is continuously formed between the first and second edges of the second seal, and
wherein the plurality of external terminals includes a plurality of conductors having a thickness substantially equal to a thickness of the second seal.
17. The semiconductor device according to claim 16 , wherein each of the external terminals comprises a conductor of the plurality of conductors penetrating the second seal and a solder ball connecting the conductor, and
wherein the solder ball comprises the parts of the external terminals.
18. The semiconductor device according to claim 1 , wherein the substrate includes a recess formed in the second surface, and
wherein the recess is filled with the second seal.
19. The semiconductor device according to claim 16 , wherein the first seal comprises a first insulating resin having a first thermal expansion coefficient,
the second seal comprises a second insulating resin having a second thermal expansion coefficient, and
the first thermal expansion coefficient is nearly equal to the second thermal expansion coefficient.
20. The semiconductor device according to claim 16 , further comprising:
a second semiconductor chip provided over the second surface of the substrate, the second semiconductor chip being covered with the second seal.
21. The semiconductor device according to claim 16 , wherein a thickness of the first seal from the first surface to a surface of the first seal is different from a thickness of the second seal from the second surface to a surface of the second seal.
22. The semiconductor device according to claim 16 , wherein each of the conductors includes a plane surface that is substantially coplanar with a surface of the second seal.
23. The semiconductor device according to claim 16 , wherein the first and second edges of the second seal are substantially aligned with first and second edges of the substrate, respectively.
24. The semiconductor device according to the claim 16 , wherein each of the lands includes a surface facing to the substrate, and an entire area of the surface of each of the lands is in contact with the second surface.
25. A semiconductor device comprising:
a substrate including a first surface, a second surface opposite to the first surface, and a plurality of lands formed on the second surface, and the substrate further including a solder resist film formed on the second surface so as to expose the plurality of lands;
a semiconductor chip mounted over the first surface of the substrate, the semiconductor chip being electrically connected to the plurality of lands;
a first seal provided over the first surface of the substrate to cover the semiconductor chip;
a second seal provided over the solder resist film of the substrate , the substrate being sandwiched between the first seal and the second seal; and
a plurality of conductors provided on the plurality of lands of the substrate so that parts of the conductors expose from the second seal,
wherein the first seal comprises first and second edges that are substantially aligned with first and second edges of the second seal, respectively, and the second seal is continuously formed between the first and second edges of the second seal, and
wherein the plurality of conductors have a thickness substantially equal to a thickness of the second seal.
26. The semiconductor device according to claim 25 , wherein each of the lands includes a surface facing to the substrate, and an entire area of the surface of each of the lands is in contact with the second surface.