Semiconductor device and method of manufacturing the same
Provided is a semiconductor device capable of increasing the capacitance of a capacitor, while reducing an area occupied by the capacitor and inductor on a substrate. The semiconductor device includes a first line; an interlayer insulating film that is formed on the first line and has a recess formed at a location corresponding to the first line; and a second line formed in the recess of the interlayer insulating film. The first line, the second line, and an insulating film formed between the first line and the second line constitute a capacitor. At least one of the first line and the second line constitutes an inductor.
1 . A semiconductor device comprising:
a first line;
an interlayer insulating film that is formed on the first line and has a recess formed at a location corresponding to the first line; and
a second line formed in the recess of the interlayer insulating film, wherein
the first line, the second line, and an insulating film formed between the first line and the second line constitute a capacitor, and
at least one of the first line and the second line constitutes an inductor.
2 . The semiconductor device according to claim 1 , further comprising:
a passive element part that includes the capacitor and the inductor; and
a wiring part that includes a third line, an interlayer insulating film formed on the third line, and a fourth line formed on the interlayer insulating film,
wherein the recess is formed only in the interlayer insulating film of the passive element part.
3 . The semiconductor device according to claim 1 , wherein the second line is an inductor.
4 . The semiconductor device according to claim 1 , wherein the insulating film constituting the capacitor is the interlayer insulating film.
5 . The semiconductor device according to claim 1 , wherein the insulating film constituting the capacitor is an insulating film different from the interlayer insulating film.
6 . The semiconductor device according to claim 1 , wherein the inductor and the capacitor constitute a low-pass filter.
7 . The semiconductor device according to claim 1 , wherein the inductor is a spiral inductor.
8 . The semiconductor device according to claim 1 , wherein the width of the first line is set to be greater than the width of the recess formed in the interlayer insulating film.
9 . The semiconductor device according to claim 1 , wherein the width of the recess formed in the interlayer insulating film is set to be greater than the width of the first line.
10 . A method of manufacturing a semiconductor device comprising:
forming a first line on a substrate;
forming an interlayer insulating film on the first line; and
forming a second line on the interlayer insulating film, wherein
the interlayer insulating film has a recess formed at a location corresponding to the first line,
the first line, the second line, and an insulating film formed between the first line and the second line constitute a capacitor, and
at least one of the first line and the second line constitutes an inductor.
11 . The method of manufacturing a semiconductor device according to claim 10 , wherein the insulating film constituting the capacitor is the interlayer insulating film.
12 . The method of manufacturing a semiconductor device according to claim 10 , wherein an insulating film which is different from the interlayer insulating film constituting the capacitor is formed on the first line.
13 . The method of manufacturing a semiconductor device according to claim 10 , wherein the width of the first line is set to be greater than the width of the recess formed in the interlayer insulating film.
14 . The method of manufacturing a semiconductor device according to claim 10 , wherein the width of the recess formed in the interlayer insulating film is set to be greater than the width of the first line.