Method of manufacturing semiconductor device, and semiconductor device
View Patent ↗A method of manufacturing a semiconductor device of the present invention include a step of forming, in a substrate, a first trench, and a second trench which crosses the first trench; a step of forming a film over the entire surface of the substrate so as to fill the first trench and the second trench; and a step of removing a portion of the film which resides over the top surface of the substrate, so as to leave the film in the first trench and the second trench; wherein in the step of forming the first trench and the second trench, a projection is formed in a portion of intersection of the first trench and the second trench, so as to extend from one of corners of the portion of intersection towards the center thereof in a plan view.
1. A method of manufacturing a semiconductor device comprising:
forming, in a substrate, a first trench, and a second trench which crosses said first trench;
forming a film over the entire surface of said substrate so as to fill said first trench and said second trench; and
removing a portion of said film which resides over the top surface of said substrate, so as to leave said film in said first trench and said second trench;
wherein in said forming said first trench and said second trench, a projection is formed in a portion of intersection of said first trench and said second trench, so as to extend from one of corners of said portion of intersection towards the center thereof in a plan view.
2. The method of manufacturing a semiconductor device as claimed in claim 1 ,
wherein in said forming said first trench and said second trench, said first trench and said second trench are formed to orthogonally cross with each other, and
said projection extends 45° away from the direction of extension of said first trench.
3. The method of manufacturing a semiconductor device as claimed in claim 1 ,
wherein in said forming said first trench and said second trench,
said projection is made nearly into a rectangle in a plan view, and
each of three corners of said portion of intersection, other than one corner connected to said projection, is chamfered in parallel with any one of the side faces of said projection opposed to said each of three corners.
4. The method of manufacturing a semiconductor device as claimed in claim 3 ,
wherein in said forming said first trench and said second trench,
said first trench and said second trench are formed to include the same width; and
the distance from each of three corners, other than one corner connected to said projection, to any one of the side faces of said projection opposed to said each of three corners, is set equal to the width of said first trench.
5. The method of manufacturing a semiconductor device as claimed in claim 1 ,
wherein said substrate is a silicon substrate, and
said film is a polysilicon film,
the method further comprising:
forming a silicon oxide film, after said forming said first trench and said second trench, and before said forming said film.