Semiconductor device and manufacturing method of the same
View Patent ↗An excessive metallic film on a device isolation region is prevented from contributing to silicidation in an end of a source-drain diffusion layer region to thereby form a silicide film with uniform film thickness. There are sequentially conducted a step of forming a device isolation region 3 in a substrate 1 including a silicon layer at least in a surface thereof and filling a first insulator in the device isolation region 3 , a step of making height of an upper surface of the first insulator less than height of an upper surface of the substrate 1 and forming a sidewall film 10 on a sidewall of the device isolation region 3 , and a step of depositing a metallic film 11 on the substrate 1 and then conducting silicidation through a thermal process.
1. A semiconductor device manufacturing method of sequentially conducting:
a step of forming a trench in a substrate including a silicon layer at least in a surface thereof and filling a first insulator in the trench;
a step of making height of an upper surface of the first insulator less than height of an upper surface of the substrate and forming a second insulator on a sidewall of the trench;
a step of depositing a metallic film on the substrate; and
forming a gate electrode via a gate insulation film on the substrate and introducing impurities in the substrate by ion implantation using the gate electrode as a mask and then conducting silicidation thereon through a thermal process.
2. A semiconductor device manufacturing method in accordance with claim 1 , characterized by comprising a step of amorphizing the surface of the substrate by ion implantation after the step of introducing impurities by ion implantation.
3. A semiconductor device manufacturing method in accordance with claim 1 , characterized in that the metallic film has thickness equal to or less than difference between the height of the upper surface of the first insulator and that of the upper surface of the substrate.
4. A semiconductor device manufacturing method in accordance with claim 1 , characterized in that the metallic film comprises one of or a plurality of elements selected from a group including Ni, Pt, Co, Ti, Er, and Yb.
5. A semiconductor device manufacturing method of sequentially conducting:
a step of forming a trench in a substrate including a silicon layer at least in a surface thereof and forming a second insulator on a sidewall of the trench;
a step of filling a first insulator in the trench;
a step of making height of an upper surface of the first insulator less than height of an upper surface of the substrate;
a step of depositing a metallic film on the substrate; and
forming a gate electrode via a gate insulation film on the substrate and introducing impurities in the substrate by ion implantation using the gate electrode as a mask and then conducting silicidation thereon through a thermal process.
6. A semiconductor device manufacturing method in accordance with claim 5 , characterized by comprising a step of amorphizing the surface of the substrate by ion implantation after the step of introducing impurities by ion implantation.
7. A semiconductor device manufacturing method in accordance with claim 5 , characterized in that the metallic film has thickness equal to or less than difference between the height of the upper surface of the first insulator and that of the upper surface of the substrate.
8. A semiconductor device manufacturing method in accordance with claim 5 , characterized in that the metallic film comprises one of or a plurality of elements selected from a group including Ni, Pt, Co, Ti, Er, and Yb.