Imprint lithography template
View Patent ↗Systems, methods, and processes for forming imprint lithography templates from a multi-layer substrate are described. The multi-layer substrate may include a block copolymer layer positioned on a substrate layer. The block copolymer layer may include two or more domains. At least one domain may have a different composition sensitivity than another domain such that the domains have different reactions to a specific process. Reaction of the domains to the specific process may provide a pattern in the block copolymer layer. The pattern may be transferred into the substrate layer to form the imprint lithography template.
1. A method, comprising:
forming a block copolymer layer on a substrate, the block copolymer layer having a first domain and a second domain, the first domain associated with a first composition state having a first etch resistance, and the second domain associated with a second composition state;
performing a first process on the block copolymer layer, the performing including:
altering, by thermal reactivity, chemical reactivity, or both, the first composition state associated with the first domain to a third composition state having a second etch resistance, the second etch resistance greater than the first etch resistance;
increasing, based on the altering, an etch selectivity between the first domain and the second domain;
removing, based on the increased etch selectivity, portions of the block copolymer layer associated with the first domain to provide one or more recessions;
maintaining the second composition state associated with the second domain to provide one or more protrusions;
in response to performing the first process, forming a pattern in the block copolymer layer, the pattern including the one or more recessions and the one or more protrusions; and,
transferring the pattern in the block copolymer layer to the substrate forming an imprint lithography template.
2. The method of claim 1 , wherein the first process is an etching process.
3. The method of claim 1 , wherein the first process is an exposure process.
4. The method of claim 1 , wherein the first process is a chemical reaction.
5. The method of claim 1 , wherein transferring the pattern includes a direct etch process.
6. The method of claim 1 , wherein transferring the pattern includes a lift-off process.
7. The method of claim 1 , further comprising performing a second process affecting the composition state of the second domain.
8. The method of claim 7 , wherein the second process provides minimal alterations in mass and dimension of the pattern.
9. The method of claim 7 , wherein the second process provides significant alterations in dimensions of the pattern.
10. The method of claim 9 , wherein the alterations include lateral alterations in the pattern.
11. The method of claim 9 , wherein the alterations include thickness alterations in the pattern.
12. The method of claim 7 , wherein the second process is a chemical reaction non-uniformly distributed through the block copolymer layer.
13. A method, comprising:
forming a block copolymer layer on a substrate layer, the block copolymer layer having a plurality of domains, each domain associated with an initial composition state and an initial etch resistance;
subjecting the block copolymer layer to a first process, the first process including:
altering, by thermal reactivity, chemical reactivity, or both, the initial composition state associated with a subset of the plurality of domains, the altered composition state of the subset of the plurality of domains having an altered etch resistance, the altered etch resistance greater than the initial etch resistance;
increasing, based on the altering, an etch selectivity between the subset of the plurality of domains and remaining domains of the plurality of domains;
removing, based on the increased etch selectivity, portions of the block copolymer layer associated with the subset of the plurality of domains to provide one or more recessions;
maintaining a composition state associated with the remaining domains of the plurality of domains to provide one or more protrusions;
in response to performing the first process, forming a pattern in the block copolymer layer, the pattern including the one or more recessions and the one or more protrusions; and,
transferring the pattern in the block copolymer layer into the substrate layer forming an imprint lithography template.
14. The method of claim 13 , wherein the first process is an etching process.
15. The method of claim 13 , wherein the first process is a chemical reaction.
16. The method of claim 13 , wherein the first process is an exposure process.
17. The method of claim 13 , further comprising subjecting the block copolymer layer to a second process, the second process affecting at least one domain composition sensitivity.
18. The method of claim 13 , wherein the pattern includes a plurality of recessions and a plurality of protrusions.
19. The method of claim 13 , wherein transferring the pattern includes applying a planarizing layer to the block copolymer layer and selectively removing portions of the planarizing layer and the block copolymer layer to transfer the pattern into the substrate layer.