Magnetic random access memory and method of manufacturing the same
View Patent ↗A magnetic random access memory includes a first wiring, a second wiring formed above and spaced apart from the first wiring, a magnetoresistive effect element formed between the first wiring and the second wiring, formed in contact with an upper surface of the first wiring, and having a fixed layer, a recording layer, and a nonmagnetic layer formed between the fixed layer and the recording layer, a metal layer formed on the magnetoresistive effect element and integrated with the magnetoresistive effect element to form stacked layers, a first side insulating film formed on side surfaces of the metal layer, the magnetoresistive effect element, and the first wiring, a first contact formed in contact with a side surface of the first side insulating film, and a third wiring formed on the metal layer and the first contact to electrically connect the magnetoresistive effect element and the first contact.
1. A magnetic random access memory manufacturing method comprising:
forming a switching element on a semiconductor substrate;
forming a first wiring above the switching element;
forming, on the first wiring, a magnetoresistive effect element having a fixed layer, a recording layer, and a nonmagnetic layer formed between the fixed layer and the recording layer;
forming a first side insulating film on side surfaces of the first wiring, and the magnetoresistive effect element;
forming a first interlayer insulating film covering the magnetoresistive effect element;
forming a first contact hole which exposes a portion of the first side insulating film;
forming, in the first contact hole, a first contact connecting to the switching element;
forming a second wiring above the first contact and the magnetoresistive effect element to electrically connect the magnetoresistive effect element and the switching element by the second wiring; and
forming a second interlayer insulating film on the second wiring.
2. The method according to claim 1 , wherein a side surface of the magnetoresistive effect element and the side surface of the first wiring are simultaneously processed.
3. The method according to claim 1 , further comprising forming a second contact hole in the first interlayer insulating film above the magnetoresistive effect element to connect the magnetoresistive effect element with the second wiring.
4. A magnetic random access memory manufacturing method comprising:
forming a switching element on a semiconductor substrate;
forming a first wiring above the switching element;
forming a top insulating film on the first wiring;
forming a first side insulating film on side surfaces of the first wiring and the top insulating film;
forming a first interlayer insulating film covering the first side insulating film and the top insulating film;
exposing the top insulating film by planarizing the first interlayer insulating film;
forming a contact hole which exposes a portion of the first side insulating film;
forming, in the contact hole, a first contact connecting to the switching element;
forming a second wiring on the first contact and the top insulating film to electrically connect the second wiring and the switching element;
forming, on the second wiring, a magnetoresistive effect element having a fixed layer, a recording layer, and a nonmagnetic layer formed between the fixed layer and the recording layer; and
forming a third wiring above the magnetoresistive effect element.
5. A magnetic random access memory manufacturing method comprising:
forming a switching element on a semiconductor substrate;
forming a first wiring above the switching element by a damascene process to form a first insulating film on side and bottom surfaces of the first wiring;
forming a top insulating film on the first wiring and the first insulating film;
forming a first interlayer insulating film covering the top insulating film;
exposing the top insulating film by planarizing the first interlayer insulating film;
forming a contact hole which exposes a portion of the first insulating film;
forming, in the contact hole, a first contact connecting to the switching element;
forming a second wiring on the first contact and the top insulating film to electrically connect the second wiring and the switching element;
forming, on the second wiring, a magnetoresistive effect element having a fixed layer, a recording layer, and a nonmagnetic layer formed between the fixed layer and the recording layer; and
forming a third wiring above the magnetoresistive effect element.