LDMOS transistor and method for manufacturing the same
View Patent ↗A LDMOS transistor and a method for manufacturing the same are disclosed. A lateral double diffused metal oxide semiconductor (LDMOS) transistor includes a first dielectric layer formed on a top surface of a substrate; a plurality of second dielectric layers on a top surface of the first dielectric layer; a plurality of contact plugs spaced apart by a predetermined distance in an active region of the substrate, passing through the first and second dielectric layers; and a bridge metal line formed in the second dielectric layers, inter-connecting the contact plugs in a horizontal direction. The bridge metal line formed to inter-connect the contact plugs allows for more current to flow in the presently disclosed LDMOS transistor than in a conventional LDMOS transistor of identical size.
1. A method for manufacturing a LDMOS transistor comprising:
forming a first dielectric layer on or over a top surface of a substrate;
forming a plurality of second dielectric layers having different dopant densities on or over a top surface of the first dielectric layer;
opening a plurality of contact holes, exposing contact regions spaced apart by a predetermined distance by etching the first and second dielectric layers;
forming a bridge metal line region in the second dielectric layer having the lowest dopant density, passing through the plurality of second dielectric layers between the contact holes exposing the contact regions in a horizontal direction; and
forming a plurality of contact plugs and a bridge metal line by depositing metal over the contact regions and in the bridge metal line region.
2. The method of claim 1 , further comprising forming a contact barrier layer in the contact regions before depositing the metal.
3. The method of claim 1 , wherein the step of forming the plurality of the second dielectric layers comprises:
forming one or more second dielectric layers on the first dielectric layer;
forming the second dielectric layer having the lowest dopant density on the one or more second dielectric layers; and
forming one or more additional second dielectric layers on the second dielectric layer having the lowest dopant density.
4. The method of claim 3 , wherein a ratio of a thickness of the one or more second dielectric layers to a thickness of the one or more additional second dielectric layers is 5:3 to 3:1.
5. The method of claim 1 , wherein the plurality of second dielectric layers comprises one or more BPSG layers.
6. The method of claim 5 , wherein the second dielectric layers having the lowest dopant density has a lower density of B and/or P than the other second dielectric layers.
7. The method of claim 1 , further comprising thermal-processing of the plurality of second dielectric layers at a temperature of 650° C. to 750° C. in an N 2 atmosphere.
8. The method of claim 1 , wherein the step of forming the bridge metal line comprises cleaning the contact regions at least one time using a basic etchant.
9. The method of claim 8 , wherein the cleaning step comprises:
a first etch of the contact regions after etching the first and second dielectric layers; and
a second etching of the contact regions before depositing the metal, wherein the first and second etches form the bridge metal line region.