IP Library Granted Patent US 9,279,187
Granted Patent B2
US 9,279,187 · App. 12/616,599 · Granted Mar 8, 2016

Method for applying a diffusion barrier interlayer for high temperature components

Inventors: Ronghua Wei (San Antonio, TX); Narayana S. Cheruvu (San Antonio, TX)
Assignee: SOUTHWEST RESEARCH INSTITUTE
C23C28/00C23C4/085C23C4/10C23C14/0036C23C14/0641C23C14/352C23C28/04F01D5/288H01J37/3408C23C14/081C23C14/548Y10T428/2495Y10T428/265Y10T428/31678
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Quick Facts
Patent No.
US 9,279,187
App. No.
12/616,599
Granted
Mar 8, 2016
Kind
B2
Abstract

A coated substrate and a method of forming a diffusion barrier coating system between a substrate and a MCrAl coating, including a diffusion barrier coating deposited onto at least a portion of a substrate surface, wherein the diffusion barrier coating comprises a nitride, oxide or carbide of one or more transition metals and/or metalloids and a MCrAl coating, wherein M includes a transition metal or a metalloid, deposited on at least a portion of the diffusion barrier coating, wherein the diffusion barrier coating restricts the inward diffusion of aluminum of the MCrAl coating into the substrate.

Claims (23)

1. A method of forming a diffusion barrier coating system between a substrate and coating comprising:

depositing a diffusion barrier coating onto at least a portion of a substrate surface, wherein said diffusion barrier coating comprises at least two compositionally different layers,

(i) a first layer having a composition selected from the group consisting of TaN, WN, Ti—Si—N, Zr—Si—N, Ta—Si—N, and Ti—Si—C—N; and

(ii) a second layer having at least 50 at % aluminum selected from the group consisting of Al 2 O 3 , Al, and AlN, wherein said second layer is distal from said substrate surface,

wherein said diffusion barrier coating layers are deposited by vapor deposition by providing a precursor gas including an element selected from the group consisting of O, N, C, and silicon at a flow rate of 1 sccm to 100 sccm, and providing a target including an element selected from the group consisting of tantalum, titanium, tungsten, zirconium, silicon, and aluminum and operating said target at a power in the range of 0.5 kW to 5kW for a deposition time in the range of 5 minutes to 100 minutes; and subsequently

depositing [M a Cr b X c ] y Al (100-y) coating distinct from the second layer of the diffusion barrier coating on at least a portion of said diffusion barrier coating, wherein

M is selected from the group consisting of iron, cobalt, nickel, manganese, tungsten, and molybdenum,

X is selected from the group consisting of a carbon and phosphorous, and

“y” is in the range of 85 wt % to 95 wt % of the total composition, “a” is in the range of 70 wt % to 90 wt % of “y”, “b” is in the range of 5 wt % to 25 wt % of “y”, and “c” is in the range of 0.1 wt % to 5 wt % of “y”,

wherein said [M a Cr b X c ] y Al (l00-y) coating is deposited by vapor deposition by utilizing a first target including chromium and at least one transition metal selected from the group consisting of iron, cobalt, nickel, manganese, tungsten, and molybdenum and a second target including aluminum, wherein said second target is operated at a power P 1 that is in the range of 20 to 40 percent of a power P 2 said first target is operated, for a deposition time in the range of 100 minutes to 600 minutes, and

wherein said [M a Cr b X c ] y Al (l00-y) coating exhibits a weight gain of up to 0.0006 g/cm 2 and a total loss in aluminum of 80 percent or less when thermally cycled at temperatures of 1010° C. for 50 minutes and force air cooling to room temperature for 10 minutes, for up to 2015 cycles.

2. The method of claim 1 , wherein said diffusion barrier coating includes at least two layers and said layers exhibit a thickness in the range of 0.1 μm to 10 μm individually.

3. The method of claim 1 , wherein said diffusion barrier coating exhibits a thickness in the range of 0.1 μm to 10 μm in combination.

4. A method of forming a diffusion barrier coating system between a substrate and a coating comprising:

depositing a diffusion barrier coating onto at least a portion of a substrate surface, wherein said diffusion barrier coating comprises at least two compositionally different layers,

(i) a first layer having a composition selected from the group consisting of Ti—Si—N, Zr—Si—N, Ta—Si—N, and Ti—Si—C—N; and

(ii) a second layer having at least 50 at % aluminum selected from the group consisting of Al 2 O 3 , Al, and AlN, wherein said second layer is distal from said substrate surface,

wherein said diffusion barrier coating layers are deposited by vapor deposition by providing a precursor gas including an element selected from the group consisting of O, N, C, and silicon at a flow rate of 1 sccm to 100 sccm, and providing a target including an element selected from the group consisting of tantalum, titanium, zirconium, silicon, and aluminum and operating said target at a power in the range of 0.5 kW to 5 kW for a deposition time in the range of 5 minutes to 100 minutes; and subsequently

depositing [MCr] y Al (100-y) coating distinct from the second layer of the diffusion barrier coating on at least a portion of said diffusion barrier coating, wherein

M is selected from the group consisting of iron, cobalt, nickel, manganese, tungsten, and molybdenum, and

“y” is in the range of 85 wt % to 95 wt % of the total composition,

wherein said [MCr] y Al (l00-y) coating is deposited by vapor deposition by utilizing a first target including chromium and at least one transition metal selected from the group consisting of iron, cobalt, manganese, tungsten and molybdenum, and a second target including aluminum, wherein said second target is operated at a power P 1 that is in the range of 20 to 40 percent of a power P 2 said first target is operated, for a deposition time in the range of 100 minutes to 600minutes, and

wherein said [MCr] y Al (l00-y) coating exhibits a weight gain of up to 0.0006 g/cm 2 and a total loss in aluminum of 80 percent or less when thermally cycled at temperatures of 1010° C. for 50 minutes and force air cooling to room temperature for 10 minutes, for up to 2015 cycles.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 22, 2010
From: WEI, RONGHUA; CHERUVU, NARAYANA S.
To: SOUTHWEST RESEARCH INSTITUTE
Reel/Frame 023833/0578 →
CONFIRMATORY LICENSE Recorded Dec 16, 2009
From: SOUTHWEST RESEARCH INSTITUTE
To: ENERGY, UNITED STATES DEPARTMENT OF
Reel/Frame 023670/0049 →
Continuity (1)
Related Publication 20110111190A1 · May 12, 2011