Electromagnetic wave measuring apparatus
View Patent ↗A desired spatial resolution upon a measurement can be attained by making an electromagnetic wave including a terahertz wave (frequency thereof is equal to or more than 0.01 [THz], and equal to or less than 100 [THz]) incident to a device under test. An electromagnetic wave measurement device includes an incident lens which makes an electromagnetic wave to be measured having a frequency equal to or more than 0.01 [THz] and equal to or less than 100 [THz] incident to a device under a test while decreasing a beam diameter of the electromagnetic wave to be measured, a scanning stage which rotates, about a line orthogonal to an optical axis of the incident lens as a rotational axis, the device under the test or the optical axis, and an electromagnetic wave detector which detects the electromagnetic wave to be measured which has transmitted through the device under the test, where a coordinate on the optical axis of a position which gives the minimum value d of the beam diameter is different from a coordinate on the optical axis of the rotational axis.
1. An electromagnetic wave measurement device comprising:
an incident optical system that makes an electromagnetic wave to be measured having a frequency equal to or more than 0.01 THz and equal to or less than 100 THz incident to a device under test while decreasing a beam diameter of the electromagnetic wave to be measured;
a rotational driver that rotates, about a line orthogonal to an optical axis of the incident optical system as a rotational axis, the device under test or the optical axis; and
an electromagnetic wave detector that detects the electromagnetic wave to be measured which has transmitted through the device under test,
wherein a coordinate on the optical axis of a position at which the beam diameter is a minimum is different from a coordinate on the optical axis of the rotational axis.
2. The electromagnetic wave measurement device according to claim 1 , wherein a relationship 0.3≦p≦0.7r is satisfied, where r denotes a radius of a cross section of the device under test on a plane orthogonal to the rotational axis, and p denotes a distance between the coordinate on the optical axis of the position at which the beam diameter is the minimum, and the coordinate on the optical axis of the rotational axis.
3. The electromagnetic wave measurement device according to claim 2 , wherein a relationship p=0.5r is satisfied.
4. The electromagnetic wave measurement device according to claim 1 , wherein:
a cross section of the device under test on a plane orthogonal to the rotational axis is to be measured; and
when p denotes a distance between the coordinate on the optical axis of the position at which the beam diameter is the minimum, and the coordinate on the optical axis of the rotational axis, p is determined so that the spatial resolution upon the measurement of the cross section takes a desired value over the entire cross section.
5. The electromagnetic wave measurement device according to claim 1 , wherein:
a cross section of the device under test on a plane orthogonal to the rotational axis is to be measured; and
a coordinate on the optical axis of a predetermined point of measurement on the cross section, which is different from an intersection between the cross section and the rotational axis, and the coordinate on the optical axis of the position at which the beam diameter is the minimum are made to coincide with each other.
6. The electromagnetic wave measurement device according to claim 1 , wherein the incident optical system can be moved in a direction of the optical axis.
7. The electromagnetic wave measurement device according to claim 1 , wherein the device under test can be moved in a direction of the optical axis.
8. The electromagnetic wave measurement device according to claim 1 , wherein a focal distance of the incident optical system can be changed.
9. The electromagnetic wave measurement device according to claim 1 , wherein:
a cross section of the device under test on a plane orthogonal to the rotational axis is to be measured; and
the cross section is measured while the device under test or the optical axis is moved to in a direction orthogonal to the optical axis and the rotational axis.
10. An electromagnetic wave measurement device comprising:
an incident optical system that makes an electromagnetic wave to be measured having a frequency equal to or more than 0.01 THz and equal to or less than 100 THz incident to a device under test while decreasing a beam diameter of the electromagnetic wave to be measured;
a rotational driver that rotates, about a line orthogonal to an optical axis of the incident optical system as a rotational axis, the device under test or the optical axis; and
an electromagnetic wave detector that detects the electromagnetic wave to be measured which has transmitted through the device under test, wherein:
a plurality of types of a coordinate on the optical axis of a position at which the beam diameter is the minimum are set when a coordinate on the optical axis of the rotational axis is an origin; and
the device under test is measured based on a result detected by the electromagnetic wave detector at the respective types of the coordinate.
11. The electromagnetic wave measurement device according to claim 10 , wherein the incident optical system can be moved in a direction of the optical axis.
12. The electromagnetic wave measurement device according to claim 10 , wherein the device under test can be moved in a direction of the optical axis.
13. The electromagnetic wave measurement device according to claim 10 , wherein a focal distance of the incident optical system can be changed.
14. The electromagnetic wave measurement device according to claim 10 , wherein:
a cross section of the device under test on a plane orthogonal to the rotational axis is to be measured; and
the cross section is measured while the device under test or the optical axis is moved in a direction orthogonal to the optical axis and the rotational axis.