Semiconductor device of common source structure and manufacturing method of semiconductor device of common source structure
View Patent ↗A semiconductor device having a common source structure and method of manufacturing the same are provided. In one embodiment, the method includes: forming a plurality of gate lines on a semiconductor substrate, each constituted by a floating gate, a dielectric layer, and a control gate having a line form; forming a first dielectric layer on the semiconductor substrate including the gate line; forming a trench having the line form in the first dielectric layer, wherein the trench exposes the semiconductor substrate between the gate lines; and forming a common source in the trench. According to an embodiment, the common source is implemented as a poly line in the trench. Therefore, etching the substrate to provide a trench for a common source can be excluded. Accordingly, it is possible to inhibit the common source from being opened due to a remaining material in a trench, and reduce damage to the semiconductor substrate.
1. A method of manufacturing a semiconductor device of a common source structure, comprising:
forming a plurality of gate lines on a semiconductor substrate, each gate line comprising a floating gate, a dielectric layer, and a control gate having a line form;
forming a first insulating dielectric layer on the semiconductor substrate including the gate line;
forming a trench having the line form in the first insulating dielectric layer, wherein the trench exposes a portion of the semiconductor substrate between a pair of the gate lines;
forming a salicide layer on the semiconductor substrate exposed through the trench; and
forming a common source in the trench on the salicide layer.
2. The method of manufacturing a semiconductor device of the common source structure according to claim 1 , further comprising:
forming a device separator in the semiconductor substrate to define unit memory cell areas.
3. The method of manufacturing a semiconductor device of the common source structure according to claim 2 , further comprising:
forming a contact plug through the first insulating dielectric layer for grounding the device separator after forming the common source.
4. The method of manufacturing a semiconductor device of the common source structure according to claim 1 , further comprising:
forming a gate dielectric layer having the line form on the semiconductor substrate before the floating gate is formed.
5. The method of manufacturing a semiconductor device of the common source structure according to claim 1 , wherein two gate lines of the plurality of gate lines are paired with the common source interposed therebetween to form a unit cell.
6. The method of manufacturing a semiconductor device of the common source structure according to claim 1 , wherein the forming a common source comprises:
forming a polysilicon layer on the first insulating dielectric layer so as to bury the trench; and
planarizing the polysilicon layer so as to expose the surface of the first insulating dielectric layer.
7. The method of manufacturing a semiconductor device of the common source structure according to claim 1 , further comprising:
forming a second insulating dielectric layer on the first insulating dielectric layer after forming the common source.
8. The method of manufacturing a semiconductor device of the common source structure according to claim 7 , wherein one or more layers of the first insulating dielectric layer and the second insulating dielectric layer are made of TEOS.
9. A semiconductor device of a common source structure, comprising:
a pair of gate lines, each gate line comprising a floating gate having a line form formed on a semiconductor substrate, a dielectric layer formed on the floating gate, and a control gate formed on the dielectric layer;
a first insulating dielectric layer formed on the semiconductor substrate including the gate line, wherein the first insulating dielectric layer comprises a trench having the line form formed therein, wherein the trench exposes the semiconductor substrate between the gate lines;
a salicide layer formed on the semiconductor substrate exposed through the trench; and
a common source formed in the trench on the salicide layer.
10. The semiconductor device of the common source structure according to claim 9 , further comprising:
a device separator in the semiconductor substrate to define a memory cell unit area, wherein the device separator is formed in a direction intersecting the line form of the gate lines.
11. The semiconductor device of the common source structure according to claim 9 , further comprising:
a gate dielectric layer formed between the semiconductor substrate and each of the floating gates.
12. The semiconductor device of the common source structure according to claim 9 , wherein the pair of gate lines and the common source interposed therebetween form a unit cell.
13. The semiconductor device of the common source structure according to claim 9 , wherein the common source is made of a polysilicon material.
14. The semiconductor device of the common source structure according to claim 9 , further comprising:
a second insulating dielectric layer formed on the first insulating dielectric layer.
15. The semiconductor device of the common source structure according to claim 14 , further comprising:
a device separator in the semiconductor substrate to define a memory cell unit area, wherein the device separator is formed in a direction intersecting the line form of the gate lines;
a contact plug formed through the second insulating dielectric layer and the first insulating dielectric layer to ground the device separator.
16. The semiconductor device of the common source structure according to claim 14 , wherein one or more layers of the first insulating dielectric layer and the second insulating dielectric layer are made of TEOS.