Axial gradient transport growth process and apparatus utilizing resistive heating
View Patent ↗A crucible has a first resistance heater is disposed in spaced relation above the top of the crucible and a second resistance heater with a first resistive section disposed in spaced relation beneath the bottom of the crucible and with a second resistive section disposed in spaced relation around the outside of the side of the crucible. The crucible is charged with a seed crystal at the top of an interior of the crucible and a source material in the interior of the crucible in spaced relation between the seed crystal and the bottom of the crucible. Electrical power of a sufficient extent is applied to the first and second resistance heaters to create in the interior of the crucible a temperature gradient of sufficient temperature to cause the source material to sublimate and condense on the seed crystal thereby forming a growing crystal.
1. An axial gradient growth method comprising:
(a) providing a crucible having a top, a bottom and a side that extends between the top of the crucible and a bottom of the crucible, a first resistance heater disposed in spaced relation above the top of the crucible, and a second, cup-shaped resistance heater having a first resistive section disposed in spaced relation beneath the bottom of the crucible and a second resistive section that extends from the first resistive section in a direction toward the first resistance heater and terminates intermediate the top and the bottom of the crucible in spaced relation around the outside of the side of the crucible;
(b) providing a seed crystal at the top of an interior of the crucible and a source material in the interior of the crucible in spaced relation between the seed crystal and the bottom of the crucible and in contact with the side of the crucible, wherein all of the source material is spaced from the bottom of the crucible by a gap between all of the source material and the bottom of the crucible;
(c) applying electrical power to the first and second resistance heaters of a sufficient extent to create in the interior of the crucible a temperature gradient of sufficient temperature to cause the source material to sublimate and condense on the seed crystal thereby forming a growth crystal; and
(d) maintaining the electrical power to the first and second resistance heaters until the growth crystal has grown to a desired size.
2. The method of claim 1 , wherein:
the first resistance heater receives between 10% and 30% of the electrical power; and
the second resistance heater receives between 70% and 90% of the electrical power.
3. The method of claim 1 , wherein a voltage applied to each heater is less than 30 VAC RMS.
4. The method of claim 3 , wherein a voltage applied to each heater is less than 25 VAC RMS.
5. The method of claim 1 , wherein an interior and an exterior of the crucible and the heaters are in the presence of between 1 Torr and 40 Torr of an inert gas during the growing of the growth crystal.
6. The method of claim 1 , wherein step (c) includes controlling the electrical power applied to the first and second resistance heaters to cause a growth crystal to grow on the seed crystal, wherein the grown growth crystal has a convex growth interface, wherein a ratio of a radius of curvature of the convex growth interface over a diameter of the grown growth crystal is between about 2 and about 4.
7. The method of claim 1 , wherein a height of the second resistive section is between 50% and 75% of a height of the crucible.