Electronic device with a gate electrode having at least two portions
View Patent ↗A transistor structure of an electronic device can include a gate dielectric layer and a gate electrode. The gate electrode can have a surface portion between the gate dielectric layer and the rest of the gate electrode. The surface portion can be formed such that another portion of the gate electrode primarily sets the effective work function in the finished transistor structure.
1. An electronic device comprising:
a first active region and a second active region;
a gate dielectric layer over at least a portion of the first active region and at least a portion of the second active region; and
a first layer formed over the first active region, wherein the first layer has a first work function;
a second layer formed over the first layer and the first active region, wherein the second layer has a second work function;
a third layer formed over the gate dielectric formed over the second active region;
wherein a first gate electrode overlies the first active region, includes portions of the first and second layers, and has an effective work function closer in value to the second work function than the first work function; and
a second gate electrode overlies the second active region and includes a portion of the third layer.
2. The electronic device of claim 1 , wherein the gate dielectric layer includes an element from Group 3, 4, or 5 of the Periodic Table.
3. The electronic device of claim 2 , wherein the gate dielectric layer comprises hafnium, zirconium, aluminum, or any combination thereof.
4. The electronic device of claim 1 , wherein the first layer of the first gate electrode comprises a metallic element.
5. The electronic device of claim 4 , wherein the metallic element is absent from both the gate dielectric layer and the second layer of the first gate electrode.
6. The electronic device of claim 1 , wherein the first layer of the first gate electrode has a thickness of at least 2 atomic layers and not more than approximately 1.1 nm.
7. The electronic device of claim 1 , wherein the second layer of the first gate electrode further comprises:
a metallic element; and
oxygen, nitrogen, silicon, carbon, or any combination thereof.
8. The electronic device of claim 1 , further comprising a substrate and an interface layer, wherein the interface layer lies between the substrate and the gate dielectric layer.
9. The electronic device of claim 8 , wherein the interface layer is not greater than approximately 1.4 nm.
10. An electronic device comprising:
a first transistor structure including:
a first gate dielectric layer; and
a first gate electrode including a first portion and a second portion, wherein:
the first portion lies between the first gate dielectric layer and the second portion;
the first portion has a first work function;
the second portion has a second work function; and
the first gate electrode has a first effective work function closer in value to the second work function than the first work function; and
a second transistor structure including:
a second gate dielectric layer; and
a second gate electrode including a third portion that abuts the second gate dielectric layer, wherein the third portion has a third work function, and the second gate electrode has a second effective work function that is substantially the third work function.
11. The electronic device of claim 10 , wherein the first, second, and third portions have different compositions as compared to one another.
12. The electronic device of claim 11 , wherein the first gate electrode further comprises a fourth portion overlying the second portion, wherein the fourth portion and the third portion of the second gate electrode have substantially a same composition.
13. The electronic device of claim 12 , wherein:
the first gate electrode further comprises a fifth portion overlying the fourth portion;
the second gate electrode further comprises a sixth portion overlying the third portion; and
the fifth and sixth portions have substantially a same composition.
14. The electronic device of claim 11 , wherein the first portion of the first gate electrode has a thickness of at least 2 atomic layers.
15. The electronic device of claim 14 , wherein the first portion of the first gate electrode is not more than approximately 1.1 nm in thickness.
16. The electronic device of claim 11 , wherein substantially all of the second portion of the first gate electrode is spaced apart from the first gate dielectric.
17. The electronic device of claim 11 , wherein the first gate dielectric layer includes an element from Group 3, 4, or 5 of the Periodic Table.
18. The electronic device of claim 11 , wherein:
the first portion of the first gate electrode comprises Ti a N b , Ta a N b , Ti a Si b N c , Ta a Si b N c , Ti a C b , Ta a C b , Ti a Si b C c , or Ta a Si b C c ;
the second portion of the first gate electrode comprises Mo a O b , Mo a N b , Mo a Si b N c , Ru a O b , Ir a O b , Ru, Ir, Mo a Si b O c , Mo a Si b O c N d , Mo a Hf b O c , Mo a Hf b O c N d , Pt, Pd, or another transition metal containing material; and
the third portion of the second gate electrode comprises Ta a C b , Ta a Si b N c , Ta a N b , Ta a Si b C, Hf a C b , Nb a C b , Ti a C b , or Ni a Si b .
19. The electronic device of claim 18 , wherein each of the first and second gate dielectric layers comprises Hf a C b , Hf a O b N c , Hf a Si b O c , Hf a Si b O c N d , Hf a Zr b O c N d , Hf a Zr b Si c O d N e , Hf a Zr b O c , Zr a Si b O c , Zr a Si b O c N d , or Zr a O b .
20. An electronic device comprising a transistor structure, the transistor structure comprising:
an interface layer having a thickness no greater than approximately 0.4 nm;
a high-k gate dielectric layer overlying the interface layer, wherein the high-k gate dielectric layer includes an element from Group 3, 4 or 5 of the Periodic Table; and
a gate electrode, including a first portion and a second portion wherein:
the first portion comprises a metallic element and lies between the gate dielectric layer and the second portion;
the first portion has a first work function;
the second portion has a second work function;
the second portion comprises:
a metallic element; and
oxygen, nitrogen, silicon, carbon, or a combination thereof; and
the gate electrode has an effective work function closer in value to the second work function than the first work function.