Semiconductor device having cylindrical lower electrode of capacitor and manufacturing method thereof

1. A semiconductor device comprising:

a plurality of capacitors each including a cylindrical lower electrode having an internal wall and an external wall, and an upper electrode disposed facing to the external wall of the lower electrode with an intervention of a dielectric film therebetween; and

a supporting film having a supporting portion, a part of which is positioned within the cylindrical lower electrode and a remaining part of which is positioned at outside of the cylindrical lower electrode, wherein

the supporting portion sandwiches an upper end region of the lower electrode by contacting to the internal wall and the external wall of the lower electrode.

2. The semiconductor device as claimed in claim 1 , wherein the supporting film further includes a buried portion filled into a center region of the cylindrical lower electrode such as surrounded by the internal wall of the lower electrode, and the supporting portion connects between the buried portions of the capacitors arranged adjacently.

3. The semiconductor device as claimed in claim 1 , wherein a quarter or more of an entire peripheral length of the external wall of the lower electrode in plan view is continuously in contact with the supporting portion.

4. The semiconductor device as claimed in claim 1 , further comprising an interlayer insulating film that covers the external wall of a lower end region of the lower electrode, wherein

the interlayer insulating film and the supporting film are made of a same material.

5. The semiconductor device as claimed in claim 1 , wherein the supporting film further includes a buried portion filled into a center region of the cylindrical lower electrode such as surrounded by the internal wall of the lower electrode, and the buried portion and a part of the supporting portion which is positioned within the center region of the cylindrical lower electrode are single-membered.

6. The semiconductor device as claimed in claim 1 , wherein

the supporting portion comprises a first supporting film and a second supporting film, the first supporting film contacting to the external wall of the upper end region of the lower electrode, the second supporting film contacting to the internal wall of the upper end region of the lower electrode, and

the upper end region of the lower electrode being sandwiched by the first supporting film and the second supporting film.

7. The semiconductor device as claimed in claim 6 , wherein the supporting film further includes a buried portion filled into a center region of the cylindrical lower electrode such as surrounded by the internal wall of the lower electrode, and the buried portion is made of the second supporting film.

8. The semiconductor device as claimed in claim 6 , wherein an upper surface of the lower electrode and a boundary surface between the first supporting film and the second supporting film are disposed at substantially same level.

9. The semiconductor device as claimed in claim 1 , wherein a plurality of the capacitors stacked and operate as one capacitor, lower electrodes of the respective capacitors are connected to each other, and upper electrodes of the respective capacitors are connected to each other.

10. A manufacturing method of a semiconductor device, comprising:

forming a plurality of openings in an insulation film;

forming a cylindrical lower electrode in each of the openings, the cylindrical lower electrode having an internal wall and an external wall;

etching a part of the insulation film so as to project an upper end region of the lower electrode from a surface of the insulation film, thereby exposing the external wall of the upper end region of the lower electrode;

forming a supporting film that connects to at least a part of the internal wall and a part of the external wall at the upper end region of the lower electrode;

removing the insulation film;

forming a dielectric film that covers an exposed surface of the lower electrode; and

forming an upper electrode such as facing to the lower electrode with an intervention of the dielectric film therebetween.

11. The manufacturing method of a semiconductor device as claimed in claim 10 , wherein

the supporting film is formed such as filling into a center region surrounded by the internal wall of the lower electrode, and

the manufacturing method further comprises patterning the supporting film to form a buried portion disposed in the center region, and a supporting portion a part of which is positioned within the center region and a remaining part of which is positioned at outside of the center region, after forming the supporting film and before removing the insulation film.

12. The manufacturing method of a semiconductor device as claimed in claim 11 , wherein the supporting film is patterned so that a quarter or more continuous part of an entire peripheral length of the external wall of the lower electrode in plan view is in contact with the supporting portion.

13. The manufacturing method of a semiconductor device as claimed in claim 11 , wherein the supporting portion connects each other the buried portions formed in the internal regions of the lower electrodes arranged adjacently.

14. The manufacturing method of a semiconductor device as claimed in claim 10 , wherein

the insulation film is removed by wet etching, and

an etching speed to the wet etching of a material configuring the supporting film is smaller than that of the insulation film.

15. A manufacturing method of a semiconductor device, comprising:

forming a first supporting film on an upper surface of an insulation film;

forming a plurality of openings that penetrates the first supporting film and the insulation film;

forming a cylindrical lower electrode in each of the openings, the cylindrical lower electrode having an internal wall and an external wall;

forming a second supporting film on the first supporting film and the internal wall of the lower electrode;

removing the insulation film; and

forming a dielectric film that covers an exposed surface of the lower electrode; and

forming an upper electrode such as facing to the lower electrode with an intervention of the dielectric film therebetween.