Multi-layered chemical-mechanical planarization pad
The present disclosure relates to a chemical mechanical planarization pad and a method of making and using a chemical mechanical planarization pad. The chemical mechanical planarization pad may include a first component including a water soluble composition and water insoluble composition exhibiting a solubility in water of less than that of the water soluble composition, wherein at least one of the water soluble and water insoluble compositions of the first component is formed of fibers. The chemical mechanical planarization pad may also include a second component, wherein the first component is present as a discrete phase in a continuous of the second component.
1. A chemical mechanical planarization pad, comprising:
a first component comprising a first fabric layer layered on a second fabric layer, wherein the first fabric layer includes a water soluble composition comprising a first fiber and the second fabric layer includes a water insoluble composition comprising a second fiber, the water insoluble composition exhibiting a solubility in water of less than that of said water soluble composition; and
a second component, wherein said first component is present as a discrete phase in a continuous phase of said second component and said water soluble composition provides pores having a size of 10 nanometers to 200 micrometers upon dissolution.
2. The pad of claim 1 , wherein said first fabric layer is in the form of a nonwoven fabric, woven fabric, or knit fabric, and said second fabric layer is in the form of a nonwoven fabric, woven fabric, or knit fabric.
3. The pad of claim 1 , further comprising water soluble particles embedded in said water insoluble composition.
4. The pad of claim 1 , wherein said water soluble composition comprises one or more materials selected from the group consisting of poly (vinyl alcohol), poly (acrylic acid), maleic acid, alginates, polysaccharides, poly cyclodextrins, as well as salts, copolymers and/or derivatives thereof.
5. The pad of claim 1 , wherein said water insoluble composition comprises one or more materials selected from the group consisting of polyester, polyamide, polyolefin, rayon, polyimide, polyphenyl sulfide and combinations thereof.
6. The pad of claim 1 , wherein said second component includes one or more materials selected from the group consisting of polycarbonate, polysulfone, polyphenylene sulfide, epoxy, various polyesters, polyimides, polyamides, polyolefins, polyacrylates, polymethylmethacrylates, polyvinyl chlorides, polyvinyl alcohols, derivatives thereof and copolymers thereof.
7. The pad of claim 1 , wherein said second component includes at least two miscible water insoluble materials.
8. The pad of claim 1 , wherein said water insoluble composition exhibits a Durometer hardness of 10 Shore A to over 80 Shore D and said second component exhibits a Durometer hardness of 30 Shore A to over 80 Shore D.