Structure and method of forming buried-channel graphene field effect device

1. A method for making a graphene device comprising the following steps:

depositing a layer of graphene on a substrate;

depositing a layer of amorphous silicon on said graphene layer having an upper layer and a lower layer;

converting the upper layer of said amorphous silicon layer into a gate dielectric layer;

forming source and drain contact regions in contact with said graphene layer; and

forming a gate electrode on said gate dielectric layer in between said source and drain contact regions.

2. The method of claim 1 in which the graphene device can be either a logic device or an analog device.

3. The method of claim 1 in which the substrate is selected from the group consisting of silicon, quartz, sapphire, polymer, polyethylene terephthalate (PET), polyethylene naphthalate (PEN), SiO 2 /Si, HfO 2 /Si, Al 2 O 3 /Si, and combinations of said materials.

4. The method of claim 1 in which the thickness of the amorphous silicon layer is in the range from about 2 nm to 15 nm.

5. The method of claim 1 in which the upper layer of said amorphous silicon layer is oxidized, nitrided or oxynitrided to form a gate dielectric layer of silicon oxide, silicon nitride or silicon oxynitride using a gas selected from the group consisting of O 2 , O 3 , H 2 O, NH 3 , N 2 O, NO, and N 2 .

6. The method of claim 1 in which the thickness of the said gate dielectrics converted from the amorphous silicon is in the range of 1.1 nm to 15 nm.

7. The method of claim 1 in which the materials for the source and drain contacts are selected from the group consisting of Ti, Pd, Au, Al, TiN, TaN, W and combinations of these metals.

8. The method of claim 1 in which the lower layer of the amorphous silicon layer at contact area is converted into silicide layer and the metal layer is deposited on top of the silicide layer to form source and drain contact.

9. The method of claim 1 in which the lower layer of the amorphous silicon layer at the contact area is removed and the metal layer is deposited directly on the graphene layer to form source and drain contact.

10. A buried channel graphene device comprising:

a substrate;

a layer of graphene on said substrate;

a layer of amorphous silicon on said graphene layer;

a gate dielectric layer on said amorphous silicon layer;

source and drain contact regions in contact with said graphene layers; and

a gate electrode on said gate dielectric layer in between said source and drain contact regions.

11. The buried channel graphene device of claim 10 in which the substrate is silicon, quartz, sapphire, polymer, polyethylene terephthalate (PET), polyethylene naphthalate (PEN), SiO 2 /Si, HfO 2 /Si, Al 2 O 3 /Si, or combinations of said substrates.

12. The buried channel graphene device of claim 10 in which the gate dielectric layer is selected from the group consisting of silicon oxide, silicon nitride, silicon oxynitride and gate stacks with silicon oxide, silicon nitride or silicon oxynitride as bottom layer and high-k gate dielectrics as top layer.

13. The buried channel graphene device of claim 10 in which the source and drain contacts are selected from the group consisting of Ti, Pd, Au, Al, TiN, TaN, W and combination of these metals.

14. The buried channel graphene device of claim 10 in which the source and drain contact contains a metal layer and a silicide layer.

15. The buried channel graphene device of claim 10 in which the source and drain contact contains only a metal layer.