Thin film transistor, method for fabricating the same and display device
A method for fabricating a TFT on a substrate includes forming a gate electrode; forming a semiconductor layer insulated from the gate electrode and partially overlapped with the gate electrode; forming a gate insulating layer between the gate electrode and the semiconductor layer, the gate insulating layer including a sol-gel compound; and forming source and drain electrodes at both sides of the semiconductor layer.
1. A method for fabricating a thin film transistor (TFT) on a substrate, comprising:
forming a gate electrode;
forming a semiconductor layer insulated from the gate electrode and partially overlapped with the gate electrode;
forming a gate insulating layer between the gate electrode and the semiconductor layer; and
forming source and drain electrodes at both sides of the semiconductor layer,
wherein the gate insulating layer includes a sol-gel compound including metal alkoxide and silicon alkoxide.
2. The method as claimed in claim 1 ,
wherein metal alkoxide has a functional group X,
wherein silicon alkoxide has a functional group Y, and
wherein each of the functional groups X and Y is selected from at least one of groups consisting of a functional group having a double bond or triple bond, an acrylate group, an epoxy group, an oxetane group and an alkyl group.
3. The method as claimed in claim 2 , wherein the sol-gel compound is cross linked by the functional groups X and Y.
4. The method as claimed in claim 1 , wherein the metal alkoxide includes at least one of Ti, Zr, Y, Al, Hf, Ca and Mg.
5. The method as claimed in claim 1 , wherein the sol-gel compound is additionally provided with a catalyst of water or alcohol.
6. The method as claimed in claim 1 , wherein the gate insulating layer is formed by at least one of printing, coating and deposition methods.
7. The method as claimed in claim 6 , wherein forming the gate insulating layer further includes a hardening process.
8. The method as claimed in claim 1 ,
wherein the gate electrode is formed on the substrate,
wherein the gate insulating layer is formed on an entire surface of the substrate including the gate electrode,
wherein the semiconductor layer is formed on the gate insulating layer to partially overlap with the gate electrode, and
wherein the source and drain electrodes are formed at both sides of the semiconductor layer.
9. The method as claimed in claim 1 ,
wherein the source and drain electrodes are formed on the substrate,
wherein the semiconductor layer is formed between the source and drain electrodes to overlap the source and drain electrodes,
wherein the gate insulating layer is formed on the semiconductor layer,
wherein the gate electrode is formed on the gate insulating layer to partially overlap with the semiconductor layer.