Resistive memory architectures with multiple memory cells per access device
View Patent ↗A resistive memory structure, for example, phase change memory structure, includes one access device and two or more resistive memory cells. Each memory cell is coupled to a rectifying device to prevent parallel leak current from flowing through non-selected memory cells. In an array of resistive memory bit structures, resistive memory cells from different memory bit structures are stacked and share rectifying devices.
1. A method of fabricating a resistive memory structure, the method comprising:
forming an access device with a source, drain and gate, the source and drain being doped to a first dopant type;
depositing inter-level dielectrics on top of the access device;
etching a via through the inter-level dielectrics to either the doped source or drain;
doping a bottom of the via with a second dopant type to form a rectifying device at the bottom of the via, wherein doping the bottom of each via results in a doped region shared by more than one via;
filling the via; and
forming a resistive memory cell above the via so that the cell is electrically coupled to the access device through the via and the rectifying device.
2. The method of claim 1 , wherein more than one rectifying device is formed within the source or drain of the access device.
3. The method of claim 1 , wherein the rectifying device formed is either a p-n junction diode or a Schottky diode.