IP Library Granted Patent US 8,169,616
Granted Patent B2
US 8,169,616 · App. 12/658,902 · Granted May 1, 2012

Interferometer step scanning systems and methods

Assignee: Agilent Technologies Australia (M) Pty Ltd
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 8,169,616
App. No.
12/658,902
Granted
May 1, 2012
Kind
B2
Abstract

In some embodiments, the pathlength difference (retardation) in a step scanning infrared (IR) spectrometer interferometer is maintained under AC servomechanism (servo) control for a first period following a step change, and under DC servo control for a second period following the first period. Data is acquired during and/or after the DC servo control period. Switching off the AC servo control prior to data acquisition allows limiting the dither-frequency noise that could otherwise affect signals of interest, particularly in fast-time-scale applications such as high-speed time-resolved spectroscopy (TSR). A mirror position control circuit controls a mirror position stepping as well as switching a mirror servo control from AC to DC.

Claims (38)

1. A method comprising:

stepping an optical pathlength difference in a step scanning interferometer from a first value to a second value;

enabling an interferometer mirror dither under AC servo control for a first time interval to stabilize the pathlength difference at the second step value;

for a second time interval subsequent to the first time interval, disabling the mirror dither under AC servo control and enabling an interferometer mirror position DC servo control; and

performing an interferometer sample data collection while the mirror dither under AC servo control is disabled.

2. The method of claim 1 , further comprising:

for the first time interval, setting an AC servo input signal to be proportional to −A+B−C+D, wherein A, B, C, and D represent time integrals of a pathlength difference optical detector signal over four equal and consecutive time intervals each equal to one fourth of a dither period; and

for the second time interval, setting a DC servo input signal to be proportional to A′+B′+C′+D′, wherein A′, B′, C′, and D′ represent time integrals of the pathlength difference optical detector signal over four equal and consecutive time intervals each equal to one fourth of the dither period.

3. The method of claim 2 , further comprising:

during the first time interval, applying an AC servo input signal gain having a first value to the pathlength difference optical detector signal to generate an AC servo input signal; and

during the second time interval, applying a DC servo input signal gain having a second value different from the first value to the pathlength difference optical detector signal to generate a DC servo input signal.

4. The method of claim 1 , further comprising setting a last error position measured during the first time interval to be an initial position offset for the second time interval.

5. The method of claim 1 , further comprising:

providing a pathlength difference optical detector signal as a servo input during the first time interval and the second time interval;

applying a high-pass filter to the pathlength difference optical detector signal for the first time interval; and

not applying the high-pass filter to the pathlength difference optical detector signal for the second time interval.

6. The method of claim 1 , further comprising:

controlling a position of a first interferometer mirror mounted on a linear motor to perform the stepping of the optical pathlength difference; and

controlling a position of a second interferometer mirror mounted on a piezoelectric transducer to perform the interferometer mirror dither.

7. An apparatus comprising:

at least one actuator configured to step an optical pathlength difference in a step scanning interferometer from a first value to a second value; and

a system controller connected to the at least one actuator and configured to enable an interferometer mirror dither under AC servo control for a first time interval to stabilize the pathlength difference at the second step value,

for a second time interval subsequent to the first period, disable the mirror dither under AC servo control and enable an interferometer mirror position DC servo control, and

perform an interferometer sample data collection while the mirror dither under AC servo control is disabled.

8. The apparatus of claim 7 , wherein the system controller is further configured to:

for the first time interval, set an AC servo input signal to be proportional to −A+B−C+D, wherein A, B, C, and D represent time integrals of a pathlength difference optical detector signal over four equal and consecutive time intervals each equal to one fourth of a dither period; and

for the second time interval, set a DC servo input signal to be proportional to A′+B′+C′+D′, wherein A′, B′, C′, and D′ represent time integrals of the pathlength difference optical detector signal over four equal and consecutive time intervals each equal to one fourth of the dither period.

9. The apparatus of claim 8 , wherein the system controller is further configured to:

during the first time interval, apply an AC servo input signal gain having a first value to the pathlength difference optical detector signal to generate an AC servo input signal; and

during the second time interval, apply a DC servo input signal gain having a second value different from the first value to the pathlength difference optical detector signal to generate a DC servo input signal.

10. The apparatus of claim 7 , wherein the system controller is further configured to set a last error position measured during the first time interval to be an initial position offset for the second time interval.

11. The apparatus of claim 7 , wherein the system controller is further configured to:

provide a pathlength difference optical detector signal as a servo input during the first time interval and the second time interval;

apply a high-pass filter to the pathlength difference optical detector signal for the first time interval; and

not apply the high-pass filter to the pathlength difference optical detector signal for the second time interval.

12. The apparatus of claim 7 , wherein the system controller is further configured to:

control a position of a first interferometer mirror mounted on a linear motor to perform the stepping of the optical pathlength difference; and

control a position of a second interferometer mirror mounted on a piezoelectric transducer to perform the interferometer mirror dither.

Assignments (8)
NULLIFICATION OF THE ERRONEOUS MERGER FILED AT REEL 025707, FRAME 0321 Recorded Feb 29, 2012
From: AGILENT TECHNOLOGIES AUSTRALIA (M) PTY LTD
To: AGILENT TECHNOLOGIES AUSTRALIA (M) PTY LTD
Reel/Frame 027781/0774 →
CHANGE OF NAME Recorded Feb 28, 2012
From: VARIAN AUSTRALIA PTY LTD
To: AGILENT TECHNOLOGIES AUSTRALIA (M) PTY LTD
Reel/Frame 027770/0798 →
CORRECTIVE ASSIGNMENT TO CORRECT THE "SUBMISSION TYPE" AND "NATURE OF CONVEYANCE" PREVIOUSLY RECORDED ON REEL 027734 FRAME 0100. ASSIGNOR(S) HEREBY CONFIRMS THE "SUBMISSION TYPE" IS "CHANGE OF NAME" RATHER THAN "CORRECTIVE ASSIGNMENT" AND "NATURE OF CONVEYANCE" IS "CHANGE OF NAME". Recorded Feb 26, 2012
From: VARIAN AUSTRALIA PTY LTD
To: AGILENT TECHNOLOGIES AUSTRALIA (M) PTY LTD
Reel/Frame 027762/0448 →
CORRECTIVE ASSIGNMENT TO CORRECT THE COVER SHEET "RECEIVING PARTY DATA" PREVIOUSLY RECORDED ON REEL 025707 FRAME 0327. ASSIGNOR(S) HEREBY CONFIRMS THE RECEIVING PARTY IS "VARIAN AUSTRALIA PTY, LTD. 679 SPRINGVALE ROAD, MULGRAVE, VICTORIA, 3170 AUSTRALIA". Recorded Feb 21, 2012
From: JOHNSON, DAVID B.; BOND, ANTHONY
To: VARIAN AUSTRALIA PTY, LTD.
Reel/Frame 027733/0682 →
CORRECTIVE ASSIGNMENT TO CORRECT THE COVER SHEET "RECEIVING PARTY" AND THE "NATURE OF CONVEYANCE" PREVIOUSLY RECORDED ON REEL 027570 FRAME 0321. ASSIGNOR(S) HEREBY CONFIRMS THE THE "RECEIVING PARTY" IS "AGILENT TECHNOLOGIES AUSTRALIA (M) PTY LTD" AND THE "NATURE OF CONVEYANCE" IS "CHANGE OF NAME". Recorded Feb 21, 2012
From: VARIAN AUSTRALIA PTY LTD
To: AGILENT TECHNOLOGIES AUSTRALIA (M) PTY LTD
Reel/Frame 027734/0100 →
MERGER Recorded Jan 27, 2011
From: VARIAN, INC.
To: AGILENT TECHNOLOGIES, INC.
Reel/Frame 025707/0321 →
CORRECTIVE ASSIGNMENT TO CORRECT THE RECEIVING PARTY ERROR ON THE COVERSHEET DATA PREVIOUSLY RECORDED ON REEL 025385 FRAME 0471. ASSIGNOR(S) HEREBY CONFIRMS THE MERGER DOCUMENT. Recorded Jan 27, 2011
From: JOHNSON, DAVID B.; BOND, ANTHONY
To: AGILENT TECHNOLOGIES, INC.
Reel/Frame 025707/0327 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 17, 2010
From: JOHNSON, DAVID B.; BOND, ANTHONY
To: CPA GLOBAL
Reel/Frame 025385/0471 →
Continuity (1)
Related Publication 20110199614A1 · Aug 18, 2011