Ion implanter, internal structure of ion implanter and method of forming a coating layer in the ion implanter
An ion implanter includes a process chamber and a coating layer. The process chamber receives a substrate and provides a space to perform an ion implantation process on the substrate. The coating layer is disposed on an inner wall of the process chamber to reduce contamination of the substrate and includes the same material as that of the substrate.
1. An ion implanter comprising:
a process chamber providing a space to receive a substrate and to perform an ion implantation process on the substrate; and
a coating layer disposed on a surface of an inner wall or an internal member which is disposed in the process chamber to prevent contamination of the substrate and comprising a same material as that of the substrate disposed in the process chamber,
wherein the coating layer has a predetermined surface roughness, and
wherein the coating layer has an average roughness in a range of about 4 to about 8 μm.
2. The ion implanter of claim 1 , wherein a thickness of the coating layer is in a range of about 100 to 1,000 μm.
3. The ion implanter of claim 1 , wherein the coating layer comprises silicon.
4. An internal structure of an ion implanter comprising:
an internal member disposed in a process chamber in which an ion implantation process on a substrate is performed; and
a coating layer disposed on a surface of the internal member and comprising a same material as that of the substrate,
wherein the coating layer has an average roughness in a range of about 4 to about 8 μm.
5. The internal structure of claim 4 , wherein the coating layer comprises silicon.
6. A method of forming a coating layer in an ion implanter comprising:
forming a coating layer on an inner wall of a process chamber, the coating layer comprising a substantially same material as that of a substrate to be subjected to an ion implantation in the process chamber; and
adjusting a surface roughness of the coating layer,
wherein the coating layer has an average roughness in a range of about 4 to about 8 μm.
7. The method of claim 6 , wherein forming the coating layer comprises:
melting a silicon powder; and
spraying the melted silicon powder toward the inner wall of the process chamber.
8. The method of claim 7 , wherein the silicon powder has a degree of purity higher than about 99% and a particle size in a range of about 30 to about 100 μm.
9. The method of claim 6 , wherein forming the coating layer is performed under atmospheric pressure or a pressure lower than the atmospheric pressure.
10. The method of claim 6 , wherein the coating layer has a thickness in a range of about 100 to about 1,000 μm.