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App. No. 12/670,576 · Confirmation No. 3468

METHOD FOR DEPOSITING CERAMIC THIN FILM BY SPUTTERING USING NON-CONDUCTIVE TARGET

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2012-06-29 CTNF Non-Final Rejection 13 View
2012-06-29 892 List of references cited by examiner 1 View
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2012-06-29 FWCLM Index of Claims 1 View
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Quick Facts
App. No.
12/670,576
Filed
2010-06-27
Effective Filing
2010-01-25
Pub. No.
US20100264017A1
Art Unit
1756