Semiconductor device and method of fabricating the same
View Patent ↗There is provided a semiconductor device and method of fabricating the same that employs an insulation film of a borazine-based compound to provided enhanced contact between a material for insulation and that for interconnection, increased mechanical strength, and other improved characteristics. The semiconductor device includes a first insulation layer having a recess with a first conductor layer buried therein, an etching stopper layer formed on the first insulation layer, a second insulation layer formed on the etching stopper layer, a third insulation layer formed on the second insulation layer, and a second conductor layer buried in a recess of the second and third insulation layers. The second and third insulation layers are grown by chemical vapor deposition with a carbon-containing borazine compound used as a source material and the third insulation layer is smaller in carbon content than the second insulation layer.
1. A manufacturing method of a semiconductor device, the semiconductor device comprising:
a first interlayer insulation film;
a first copper wiring formed in the first interlayer insulation film;
a first insulation film formed on the first interlayer insulation film and the first copper wiring;
a second interlayer insulation film formed on the first insulation film, the second interlayer insulation film having a first via hole and a first trench, a bottom of the first via hole exposing an upper surface of the first copper wiring, a top of the first via hole connecting to a bottom of the first trench;
a second copper wiring formed in the first via hole and the first trench;
a second insulation film formed on the second copper wiring and the second interlayer insulation film; and
a third insulation film formed between the second interlayer insulation film and the second insulation film, the third insulation film connecting to the second interlayer insulation film, the third insulation film connecting to the second insulation film, the manufacturing method of the semiconductor device comprising:
forming the first interlayer insulation film, the first copper wiring;
forming the first insulation film;
forming the second interlayer insulation film by using CVD;
forming the third insulation film on the second interlayer insulation film by using CVD;
forming the second copper wiring; and
forming the second insulation film on the third insulation film and the second copper wiring,
wherein each of the second interlayer insulation film and the third insulation film comprises a borazine based compound, and
wherein the third insulation film layer is smaller in carbon content than the second interlayer insulation film.
2. The manufacturing method of the semiconductor device according to claim 1 ,
wherein the second interlayer insulation film consists of a first borazine based compound, and the third insulation film consists of a second borazine based compound.
3. A manufacturing method of a semiconductor device, the semiconductor device comprising:
a first interlayer insulation film;
a first copper wiring formed in the first interlayer insulation film;
a first insulation film formed on the first interlayer insulation film and the first copper wiring;
a second interlayer insulation film formed on the first insulation film, the second interlayer insulation film having a first via hole and a first trench, a bottom of the first via hole exposing an upper surface of the first copper wiring, a top of the first via hole connecting to a bottom of the first trench;
a second copper wiring formed in the first via hole and the first trench;
a second insulation film formed on the second copper wiring and the second interlayer insulation film; and
a third insulation film formed between the second interlayer insulation film and the second copper wiring, the third insulation film connecting to the second interlayer insulation film, the third insulation film connecting to the second copper wiring, the third insulation film formed on a side wall and a bottom surface of the first trench and a side wall of the first via hole,
the manufacturing method of the semiconductor device comprising:
forming the first interlayer insulation film, the first copper wiring;
forming the first insulation film;
forming the second interlayer insulation film by using CVD;
forming the third insulation film on the second interlayer insulation film so as to form the third insulation film on a surface of the first via hole the first trench by using CVD;
forming the second copper wiring; and
forming the second insulation film on the second copper wiring and the second interlayer insulation film,
wherein each of the second interlayer insulation film and the third insulation film comprises a borazine based compound, and
wherein the third insulation film layer is smaller in carbon content than the second interlayer insulation film.
4. The manufacturing method of the semiconductor device according to claim 3 ,
wherein the second interlayer insulation film consists of a first borazine based compound, and the third insulation film consists of a second borazine based compound.
5. A manufacturing method of a semiconductor device, the semiconductor device comprising:
a first interlayer insulation film;
a first copper wiring formed in the first interlayer insulation film;
a first insulation film formed on the first interlayer insulation film and the first copper wiring;
a second interlayer insulation film formed on the first insulation film, the second interlayer insulation film having a first via hole and a first trench, a bottom of the first via hole exposing an upper surface of the first copper wiring, a top of the first via hole connecting to a bottom of the first trench;
a second copper wiring formed in the first via hole and the first trench;
a second insulation film formed on the second copper wiring and the second interlayer insulation film; and
a third insulation film formed between the second interlayer insulation film and the first insulation film, the third insulation film connecting to the second interlayer insulation film, the third insulation film connecting to the first insulation film,
the manufacturing method of the semiconductor device comprising:
forming the first interlayer insulation film, the first copper wiring;
forming the first insulation film;
forming the third insulation film on the first insulation film by using CVD;
forming the second interlayer insulation film on the third insulation film by using CVD;
forming the second copper wiring; and
forming the second insulation film on the second copper wiring and the second interlayer insulation film,
wherein each of the second interlayer insulation film and the third insulation film comprises a borazine based compound, and
wherein the third insulation film is smaller in carbon content than the second interlayer insulation film.
6. The manufacturing method of the semiconductor device according to claim 5 ,
wherein the second interlayer insulation film consists of a first borazine based compound, and the third insulation film consists of a second borazine based compound.