Double-sided nano-imprint lithography system
View Patent ↗A nano-imprint lithography system is described for patterning first and second substrates, the system includes a translation stage constructed to alternatively place substrate chucks in position with respect to a nano-imprint mold assembly such that the nano-imprint mold assembly may imprint a pattern on one of the substrates, while concurrently obtaining a desired spatial relationship for the remaining substrate.
1. A nano-imprint lithography system for patterning first and second substrates, the system comprising:
a nano-imprint mold assembly;
a translation stage spaced-apart from the nano-imprint mold assembly;
first and second fluid dispensers constructed to position nano-imprint fluid on the first and second substrates, respectively;
a first substrate chuck coupled to the translation stage, the first substrate chuck constructed to provide for positioning of the first substrate thereon, the first substrate chuck having a surface with a cavity formed therein and configured such that polymeric material formed on a surface of the first substrate may be positioned within the cavity;
a second substrate chuck coupled to the translation stage, constructed to provide for positioning of the second substrate thereon, the second substrate chuck having a surface with a cavity formed therein and configured such that polymeric material formed on a surface of the second substrate may be positioned within the cavity;
wherein the translation stage is constructed to alternatively place the first and second substrate chucks in first and second positions with respect to the nano-imprint mold assembly such that the nano-imprint mold assembly may imprint a pattern on one of the first and second substrates while concurrently obtaining a desired spatial relationship to position the remaining substrate of the first and second substrates upon either the first or second substrate chuck; and with the system being calibrated such that the first and second substrate are subjected to substantially the same process conditions.
2. The system as recited in claim 1 wherein the translation stage further comprises a theta stage that may rotate about an axis perpendicular to the theta stage.
3. The system as recited in claim 1 further including a robot to position the first and second substrates upon the first and second substrate chucks, respectively, and further remove the first and second substrates from the first and second substrate chucks, respectively.
4. The system as recited in claim 1 wherein the system further comprises a plurality of substrate chucks.
5. The system as recited in claim 1 wherein the system further comprises a plurality of fluid dispensers.
6. A nano-imprint lithography system for patterning first, second, third, and fourth substrates, the system comprising:
a first module comprising:
a first nano-imprint mold assembly;
a first and a second substrate chuck constructed to provide for positioning of the first and second substrates thereon, respectively, the first and second substrate chucks each having a surface with a cavity formed therein and configured such that polymeric material formed on surfaces of the first and second substrates may be positioned within the cavities of the first and second substrate chucks, respectively;
a second module comprising:
a second nano-imprint mold assembly;
a third and a fourth substrate chuck constructed to provide for positioning of the third and fourth substrates thereon, respectively, the third and fourth substrate chucks each having a surface with a cavity formed therein and configured such that polymeric material formed on surfaces of the third and fourth substrates may be positioned within the cavities of the third and fourth substrate chucks, respectively;
a translation stage spaced-apart from the first and the second nano-imprint mold assemblies having the first, second, third, and fourth substrate chucks coupled thereto, with the translation stage alternatively placing the substrate chucks positions with respect to the first and second nano-imprint mold assemblies, respectively, such that in the first position the first nano-imprint mold assembly may imprint a pattern on one of the first and second substrates and the second nano-imprint mold assembly may imprint a pattern on one of the third and fourth substrates while concurrently obtaining a desired spatial relationship to position the remaining substrate of the first and second substrates upon either the first or second substrate chuck and obtaining a desired spatial relationship to position the remaining substrate of the third and fourth substrates upon either the third or fourth substrate chuck.
7. The system as recited in claim 6 further including first and second fluid dispensers to position fluid on the first, second, third, and fourth substrates.
8. The system as recited in claim 6 wherein the translation stage further comprises a theta stage that may rotate about an axis perpendicular to the theta stage.
9. The system as recited in claim 6 further including a robot to position the first, second, third, and fourth substrates upon the first, second, third, and fourth substrate chucks, respectively, and further remove the first, second, third, and fourth substrates from the first, second, third, and fourth substrate chucks, respectively.
10. The system as recited in claim 6 , where the system is calibrated such that the first, second, third, and fourth substrates are subjected to substantially the same process conditions.
11. A nano-imprint lithography system for patterning first and second substrates, the system comprising:
a nano-imprint mold assembly;
a translation stage spaced-apart from the nano-imprint mold assembly;
first and second fluid dispensers constructed to position nano-imprint fluid on the first and second substrates, respectively;
a first substrate chuck coupled to the translation stage, the first substrate chuck constructed to provide for positioning of the first substrate thereon, the first substrate chuck having a surface with a first cavity formed therein and configured such that polymeric material formed on a surface of the first substrate may be positioned within the first cavity;
a second substrate chuck coupled to the translation stage, the second substrate chuck constructed to provide for positioning of the second substrate thereon, the second substrate chuck having a surface with a cavity formed therein and configured such that polymeric material formed on a surface of the second substrate may be positioned within the cavity;
wherein the translation stage is constructed to alternatively place the first and second substrate chucks in first and second positions with respect to the nano-imprint mold assembly such that the nano-imprint mold assembly may imprint a pattern on one of the first and second substrates while concurrently obtaining a desired spatial relationship between the remaining substrate of the first and second substrates and either the first or second substrate chuck.
12. The system as recited in claim 11 wherein the translation stage further comprises a theta stage that may rotate about an axis perpendicular to the theta stage.
13. The system as recited in claim 11 further including a robot to position the first and second substrates upon the first and second substrate chucks, respectively, and further remove the first and second substrates from the first and second substrate chucks, respectively.
14. The system as recited in claim 11 wherein the system further comprises a plurality of substrate chucks.
15. The system as recited in claim 11 wherein the translation stage is constructed to alternatively place the first and second substrate chucks in first and second positions by flipping the first substrate substantially 180 degrees relative to the nano-imprint mold assembly.
16. The system as recited in claim 11 wherein the system further comprises a plurality of fluid dispensers.
17. The system as recited in claim 11 wherein the first fluid dispenser system is coupled to the nano-imprint mold assembly.
18. The system as recited in claim 17 wherein the second fluid dispenser is coupled to the nano-imprint mold assembly.