Method for manufacturing magnetic recording medium, magnetic recording medium, and magnetic recording and reproducing apparatus
View Patent ↗There are provided a method for manufacturing a magnetic recording medium which is excellent in terms of both the recording and reproduction characteristics and the thermal fluctuation characteristics without reducing the density and hardness of the perpendicular magnetic layer; a magnetic recording medium; and a magnetic recording and reproducing apparatus with which an excellent recording density is achieved, wherein, in the method for manufacturing the magnetic recording medium, at least a portion of the perpendicular magnetic layer 4 is formed as a magnetic layer having a granular structure that contains Co as a major component and also contains an oxide of at least one nonmagnetic metal selected from the group consisting of Cr, Si, Ta, Al, Ti, W and Mg; a target for forming the perpendicular magnetic layer 4 by the sputtering process is prepared so as to include an oxide of Co and a compound of Co and at least one nonmagnetic metal selected from the group consisting of Cr, Si, Ta, Al, Ti, W and Mg, and to make the proportion of oxygen contained in the target higher than the proportion of oxygen contained in the perpendicular magnetic layer 4 ; and a sputtering gas pressure at the time of forming the perpendicular magnetic layer is set to 1 Pa or less.
1. A method for manufacturing a magnetic recording medium, the method comprising:
a step for forming at least an orientation control layer on a nonmagnetic substrate which controls the orientation properties of a layer immediately above; and
a step for forming a perpendicular magnetic layer by a sputtering process in which the axis of easy magnetization is mainly oriented perpendicularly with respect to the nonmagnetic substrate,
wherein in the step for forming a perpendicular magnetic layer, at least a portion of the perpendicular magnetic layer is formed as a magnetic layer having Co as a major component and a granular structure which includes an oxide of at least one nonmagnetic metal selected from the group consisting of Cr, Si, Ta, Al, Ti, W and Mg,
wherein a target for forming the perpendicular magnetic layer by the sputtering process is prepared so as to include an oxide of Co and a compound of Co and at least one nonmagnetic metal selected from the group consisting of Cr, Si, Ta, Al, Ti, W and Mg, and to make the proportion of oxygen contained in the target within a range from 2.3 to 4 times higher than the proportion of oxygen contained in the perpendicular magnetic layer, and
a sputtering gas pressure at the time of forming the perpendicular magnetic layer is set to 1 Pa or less, and
wherein in the step for forming a perpendicular magnetic layer, magnetic particles of the perpendicular magnetic layer are formed as a columnar crystal continuous from particles which constitute the orientation control layer, and
wherein in the step for forming a perpendicular magnetic layer, a content of oxides contained in the perpendicular magnetic layer is within a range from 3 to 18 mol % with respect to the total molar amount of elements constituting magnetic particles of the perpendicular magnetic layer.
2. The method for manufacturing a magnetic recording medium according to claim 1 , wherein in the step for forming a perpendicular magnetic layer, the proportion of oxygen contained in the target is within a range from 2.5 to 4 times higher than the proportion of oxygen contained in the perpendicular magnetic layer.
3. The method for manufacturing a magnetic recording medium according to claim 1 , wherein in the step for forming a perpendicular magnetic layer, the target for forming the perpendicular magnetic layer by the sputtering process is prepared so as to consist essentially of Co or Co alloy, an oxide of Co, and a compound of Co and at least one nonmagnetic metal selected from the group consisting of Cr, Si, Ta, Al, Ti, W and Mg.
4. The method for manufacturing a magnetic recording medium according to claim 1 , wherein in the step for forming a perpendicular magnetic layer, the target for forming the perpendicular magnetic layer by the sputtering process is prepared so as to consist essentially of CoCrPt alloy, an oxide of Co, and a compound of Co and Si.
5. The method for manufacturing a magnetic recording medium according to claim 1 , wherein in the step for forming a perpendicular magnetic layer, the proportion of oxygen contained in the target be capable of compensating for an eliminated oxygen in the perpendicular magnetic layer from the oxygen in excess contained within the oxide of Co in the target.
6. The method for manufacturing a magnetic recording medium according to claim 1 , wherein in the step for forming a perpendicular magnetic layer, the perpendicular magnetic layer is directly formed on the orientation control layer.
7. The method for manufacturing a magnetic recording medium according to claim 1 , wherein in the step for forming a perpendicular magnetic layer, the perpendicular magnetic layer is formed on a nonmagnetic base layer provided on the orientation control layer.
8. A method for manufacturing a magnetic recording medium, the method comprising:
a step for forming at least an orientation control layer on a nonmagnetic substrate which controls the orientation properties of a layer immediately above; and
a step for forming two or more perpendicular magnetic layers by a sputtering process in which the axis of easy magnetization is mainly oriented perpendicularly with respect to the nonmagnetic substrate,
wherein, in the step for forming two or more perpendicular magnetic layers, the perpendicular magnetic layers include a lower magnetic layer that is the nearest layer to the nonmagnetic substrate among the perpendicular magnetic layers, and
the lower magnetic layer is formed by a sputtering process in which the axis of easy magnetization is mainly oriented perpendicularly with respect to the nonmagnetic substrate, wherein in the step for forming the lower magnetic layer, at least a portion of the lower magnetic layer is formed as a magnetic layer having Co as a major component and a granular structure which includes an oxide of at least one nonmagnetic metal selected from the group consisting of Cr, Si, Ta, Al, Ti, W and Mg, wherein a target for forming the lower magnetic layer by the sputtering process is prepared so as to include an oxide of Co and a compound of Co and at least one nonmagnetic metal selected from the group consisting of Cr, Si, Ta, Al, Ti, W and Mg, and to make the proportion of oxygen contained in the target within a range from 2.3 to 4 times higher than the proportion of oxygen contained in the lower magnetic layer, and a sputtering gas pressure at the time of forming the lower magnetic layer is set to 1 Pa or less, and wherein in the step for forming the lower magnetic layer, magnetic particles of the lower magnetic layer are formed as a columnar crystal continuous from particles which constitute the orientation control layer, and wherein in the step for forming the lower magnetic layer, a content of oxides contained in the lower magnetic layer is within a range from 3 to 18 mol % with respect to the total molar amount of elements constituting magnetic particles of the lower magnetic layer.
9. A method for manufacturing a magnetic recording medium, the method comprising:
a step for forming at least an orientation control layer on a nonmagnetic substrate which controls the orientation properties of a layer immediately above; and
a step for forming two or more perpendicular magnetic layers by a sputtering process in which the axis of easy magnetization is mainly oriented perpendicularly with respect to the nonmagnetic substrate,
wherein, in the step for forming two or more perpendicular magnetic layers, the perpendicular magnetic layers include a lower magnetic layer and an intermediate magnetic layer in this order from the nonmagnetic substrate side, and
the lower magnetic layer and the intermediate magnetic layer are formed by a sputtering process in which the axis of easy magnetization is mainly oriented perpendicularly with respect to the nonmagnetic substrate, wherein in the step for forming the lower magnetic layer and the intermediate magnetic layer, at least a portion of the lower magnetic layer and the intermediate magnetic layer is formed as a magnetic layer having Co as a major component and a granular structure which includes an oxide of at least one nonmagnetic metal selected from the group consisting of Cr, Si, Ta, Al, Ti, W and Mg, wherein a target for forming the lower magnetic layer and the intermediate layer by the sputtering process is prepared so as to include an oxide of Co and a compound of Co and at least one nonmagnetic metal selected from the group consisting of Cr, Si, Ta, Al, Ti, W and Mg, and to make the proportion of oxygen contained in the target within a range from 2.3 to 4 times higher than the proportion of oxygen contained in the lower magnetic layer and the intermediate magnetic layer, and a sputtering gas pressure at the time of forming the lower magnetic layer is set to 1 Pa or less, and wherein in the step for forming the lower magnetic layer and the intermediate magnetic layer, magnetic particles of the lower magnetic layer and intermediate magnetic layer are formed as a columnar crystal continuous from particles which constitute the orientation control layer, and wherein in the step for forming the lower magnetic layer and the intermediate layer, a content of oxides contained in the lower magnetic layer and the intermediate layer is within a range from 3 to 18 mol % with respect to the total molar amount of elements constituting magnetic particles of the lower magnetic layer and the intermediate layer.