GaN compound semiconductor light emitting element and method of manufacturing the same
View Patent ↗The present invention relates to a gallium nitride (GaN) compound semiconductor light emitting element (LED) and a method of manufacturing the same. The present invention provides a vertical GaN LED capable of improving the characteristics of a horizontal LED by means of a metallic protective film layer and a metallic support layer. According to the present invention, a thick metallic protective film layer with a thickness of at least 10 microns is formed on the lateral and/or bottom sides of the vertical GaN LED to protect the element against external impact and to easily separate the chip. Further, a metallic substrate is used instead of a sapphire substrate to efficiently release the generated heat to the outside when the element is operated, so that the LED can be suitable for a high-power application and an element having improved optical output characteristics can also be manufactured. A metallic support layer is formed to protect the element from being distorted or damaged due to impact. Furthermore, a P-type electrode is partially formed on a P-GaN layer in a mesh form to thereby maximize the emission of photons generated in the active layer toward the N-GaN layer.
1. A method of manufacturing a vertical semiconductor light emitting element, comprising the steps of:
sequentially forming an N-type semiconductor layer, an active layer and a P-type semiconductor layer on a substrate;
forming an insulation film on a lateral side of the N-type semiconductor layer except a portion of the P-type semiconductor layer;
forming a P-type electrode on the portion of the P-type semiconductor layer on which the insulation film is not formed;
forming a metallic support film layer in such a way to wrap around the P-type and N-type semiconductor layers;
removing the substrate; and
forming an N-type electrode on the N-type semiconductor layer.
2. The method as claimed in claim 1 , further comprising the step of, after the step of forming the P-type electrode, forming a reflective layer on the P-type semiconductor layer on which the P-type electrode is formed.
3. The method as claimed in claim 1 , further comprising the steps of, after the step of forming a reflective layer on the P-type semiconductor layer, removing the reflective layer on a region on which the P-type electrode will be formed and forming the P-type electrode on the region from which the reflective layer is removed.
4. The method as claimed in claim 1 , further comprising the step of, after the step of forming the metallic protective film layer, forming a metallic support layer on the P-type semiconductor layer on which the metallic protective film layer is formed.
5. The method as claimed in claim 1 , further comprising the steps of, after the step of removing the substrate, forming an anti-reflective layer on the N-type semiconductor layer and exposing a portion of the N-type semiconductor layer by removing a portion of the anti-reflective layer.
6. The method as claimed in claim 1 , wherein the step of forming the insulation film on a lateral side of the N-type semiconductor layer except a portion of the P-type semiconductor layer comprises the steps of forming the insulation film in such a way to wrap around the P-type and N-type semiconductor layers and removing the portion of the insulation film from the P-type semiconductor layer.