Tunable gate electrode work function material for transistor applications
View Patent ↗Described herein are metal gate electrode stacks including a low resistance metal cap in contact with a metal carbonitride diffusion barrier layer, wherein the metal carbonitride diffusion barrier layer is tuned to a particular work function to also serve as a work function metal for a pMOS transistor. In an embodiment, the work function-tuned metal carbonitride diffusion barrier prohibits a low resistance metal cap layer of the gate electrode stack from migrating into the MOS junction. In a further embodiment of the present invention, the work function of the metal carbonitride barrier film is modulated to be p-type with a pre-selected work function by altering a nitrogen concentration in the film.
1. A CMOS device comprising:
an nMOS work function metal on a gate dielectric in a first region of a substrate;
a pMOS work function metal on the gate dielectric in a second region of the substrate and on the nMOS work function metal, wherein the pMOS work function metal is amorphous tantalum carbonitride comprising approximately 30 atomic percent tantalum and having a work function of at least 4.8 eV; and
a metal cap on the amorphous tantalum carbonitride, wherein the amorphous tantalum carbonitride has a thickness no greater than 500 Å.
2. The CMOS device of claim 1 , wherein the metal cap is one or a combination of metals selected from the group consisting of silver, copper, aluminum and tungsten.
3. The CMOS device of claim 1 , further comprising an nMOS transistor with a gate electrode stack comprising the metal cap and the nMOS work function metal with the pMOS work function metal there between.
4. The CMOS device of claim 1 , wherein the tantalum carbonitride has a thickness between 25 Å and 500 Å.
5. The CMOS device of claim 1 , wherein the tantalum carbonitride comprises between 30 atomic percent and 50 atomic percent nitrogen.
6. The CMOS device of claim 1 , wherein the tantalum carbonitride comprises between 10 atomic percent and 30 atomic percent carbon.
7. The CMOS device of claim 1 , wherein the tantalum carbonitride comprises 10-30 atomic percent carbon and 30-50 atomic percent nitrogen.
8. The CMOS device of claim 7 , wherein the tantalum carbonitride comprises, approximately 10 atomic percent carbon and approximately 50 atomic percent nitrogen.
9. The CMOS device of claim 7 , wherein the tantalum carbonitride comprises approximately 30 atomic percent carbon and approximately 30 atomic percent nitrogen.
10. The CMOS device of claim 1 , wherein the amorphous tantalum carbonitride has a thickness sufficient to prevent diffusion of the metal cap into the nMOS work function metal.
11. The CMOS device of claim 1 , wherein the nMOS work function metal comprises a metal carbide.
12. The CMOS device of claim 11 , wherein the nMOS work function metal comprises approximately 30 atomic percent 50 atomic percent of a metal selected from the group consisting of tantalum, titanium, tungsten, nickel and cobalt.
13. The CMOS device of claim 1 , wherein the work function is no greater than 5.2 eV.
14. A CMOS device comprising:
an nMOS work function metal on a gate dielectric in a first region of a substrate;
a pMOS work function metal on the gate dielectric in a second region of the substrate and on the nMOS work function metal, wherein the pMOS work function metal is amorphous tantalum carbonitride comprising approximately 30 atomic percent tantalum 10-30 atomic percent carbon and 30-50 atomic percent nitrogen with other constituents making up the balance and having a work function of at least 4.8 eV; and
a metal cap on the amorphous tantalum carbonitride, wherein the amorphous tantalum carbonitride has a thickness no greater than 500 Å.
15. The CMOS device of claim 14 , wherein the tantalum carbonitride has a thickness between 25 Å and 500 Å.
16. The CMOS device of claim 14 , further comprising an nMOS transistor with a gate electrode stack comprising the metal cap and the nMOS work function metal with the pMOS work function metal there between.
17. The CMOS device of claim 14 , wherein the nMOS work function metal comprises a metal carbide.
18. The CMOS device of claim 14 , wherein the nMOS work function metal comprises approximately 30 atomic percent 50 atomic percent of a metal selected from the group consisting of tantalum, titanium, tungsten, nickel and cobalt.